Modeling of Laser Chemical Vapor Deposition of Thin Films

1996 ◽  
pp. 203-235
Author(s):  
A. Kar ◽  
J. Mazumder
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition

scholarly journals Synthesis of Cobalt Oxides Thin Films Fractal Structures by Laser Chemical Vapor Deposition

2014 ◽  
Vol 2014 ◽  
pp. 1-6 ◽  
Author(s):  
P. Haniam ◽  
C. Kunsombat ◽  
S. Chiangga ◽  
A. Songsasen
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Chemical Vapor ◽  
Cobalt Oxides ◽  
Fractal Structures ◽  
Laser Chemical Vapor Deposition ◽  
Diffusion Limited Aggregation ◽  
Diffusion Limited

Thin films of cobalt oxides (CoO and Co3O4) fractal structures have been synthesized by using laser chemical vapor deposition at room temperature and atmospheric pressure. Various factors which affect the density and crystallization of cobalt oxides fractal shapes have been examined. We show that the fractal structures can be described by diffusion-limited aggregation model and discuss a new possibility to control the fractal structures.

Preparation of Conductingpolymer Thin Films by Excimer Laser Chemical Vapor Deposition

1997 ◽  
Vol 294 (1) ◽  
pp. 35-38 ◽  
Author(s):  
Satoru Nishio ◽  
Shin-Ichi Okada ◽  
Yae Minamimoto ◽  
Motoyoshi Okumura ◽  
Akiyoshi Matsuzaki ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Excimer Laser ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition

Laser chemical vapor deposition of cobalt thin films

1992 ◽  
Vol 72 (8) ◽  
pp. 3480-3484 ◽  
Author(s):  
K. Schulmeister ◽  
J. G. Lunney ◽  
B. Buckley
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Cobalt Thin Films

scholarly journals Preparation of rutile TiO2 thin films by laser chemical vapor deposition method

2013 ◽  
Vol 2 (2) ◽  
pp. 162-166 ◽  
Author(s):  
Dongyun Guo ◽  
Akihiko Ito ◽  
Takashi Goto ◽  
Rong Tu ◽  
Chuanbin Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Chemical Vapor Deposition Method ◽  
Deposition Method ◽  
Laser Chemical Vapor Deposition ◽  
Tio2 Thin Films ◽  
Rutile Tio2

Silicon dioxide thin films prepared by ArF excimer laser chemical vapor deposition from silicon tetraacetate

1998 ◽  
Vol 54 (1-3) ◽  
pp. 197-200
Author(s):  
Naoki Tanaka ◽  
Atsushi Maruyama ◽  
Ken Yukimura ◽  
Shinzo Yoshikado ◽  
Toshiro Maruyama
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Silicon Dioxide ◽  
Excimer Laser ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Arf Excimer Laser
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