Crystal Structure of Zirconium Oxide Deposited as Thin Films from Zr-acetylacetonate and Zr-ter-butoxide by Laser Chemical Vapor Deposition Technique

2001 ◽  
Vol 40 (Part 1, No. 6A) ◽  
pp. 4051-4055 ◽  
Author(s):  
Akio Watanabe ◽  
Tetsuo Tsuchiya ◽  
Yoji Imai
Keyword(s):  
Crystal Structure ◽  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Zirconium Oxide ◽  
Chemical Vapor ◽  
Deposition Technique ◽  
Laser Chemical Vapor Deposition ◽  
Chemical Vapor Deposition Technique ◽  
Vapor Deposition Technique

Functionalizable and electrically conductive thin films formed by oxidative chemical vapor deposition (oCVD) from mixtures of 3-thiopheneethanol (3TE) and ethylene dioxythiophene (EDOT)

2016 ◽  
Vol 4 (16) ◽  
pp. 3403-3414 ◽  
Author(s):  
Hilal Goktas ◽  
Xiaoxue Wang ◽  
Nicolas D. Boscher ◽  
Stephen Torosian ◽  
Karen K. Gleason
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Optoelectronic Properties ◽  
Deposition Technique ◽  
Electrically Conductive ◽  
Chemical Vapor Deposition Technique ◽  
Vapor Deposition Technique ◽  
Conductive Thin Films

Tuning the optoelectronic properties and the density of hydroxyl pendant groups of 3-thiopheneethanol-co-ethylenedioxythiohene produced via an oxidative chemical vapor deposition technique.

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