In Situ Substrate Chemical Analysis during Sputter Deposition

Author(s):  
M. Hecq ◽  
P. Legrand
2020 ◽  
Author(s):  
Gaurav Mahamuni ◽  
Jiayang He ◽  
Jay Rutherford ◽  
Byron Ockerman ◽  
Edmund Seto ◽  
...  

<p>Exposure to combustion generated aerosols such as PM from residential woodburning, forest fires, cigarette smoke, and traffic emission have been linked to adverse health outcomes. It is important to assess the chemical composition of PM to examine personal exposure. Excitation-emission matrix (EEM) spectroscopy has been shown as a sensitive and cost-effective technique for evaluation of combustion PM composition and as a source apportionment tool. However, EEM measurements are hindered by a solvent extraction step and a need for benchtop instrumentation. Here, we present a methodology that eliminates this labor-intensive sample preparation and allows to automate and miniaturize the detection platform. A miniature electrostatic collector deposits PM sample onto transparent polydimethylsiloxane (PDMS) coated substrate, where PAH components are extracted into solid-phase (SP) solvent and analyzed using EEM spectroscopy in-situ. We evaluated external and internal excitation schemes to optimized signal to noise ratio. Analysis of woodsmoke and cigarette smoke samples showed good agreement with liquid extraction EEM spectra. Internal excitation is hindered by fluorescent interference from PDMS at λ<250nm. The external excitation EEM spectra are dependent on the incident angle; ranges of 30-40⁰ and 55-65⁰ showed the best results. The proposed SP-EEM technique can be used for development of miniaturized sensors for chemical analysis of combustion generated PM. </p>


1968 ◽  
Vol 22 (6) ◽  
pp. 758-760 ◽  
Author(s):  
Solomon F. Brokeshoulder ◽  
Farrel R. Robinson

Suitable microspectrochemical techniques have been devised for the laser microprobe made by the Jarrell—Ash Co. to detect beryllium in histologic structures. Density and type of tissue, thickness of the specimen, character of the embedding medium, concentration and localization of the element, and the penetrability of the laser beam must be considered in preparing biological specimens for chemical analysis by the microspectrochemical technique. Advantages of this technique are the identification of specific elements in situ and the correlation of the presence of the element with a specific histologic structure.


1994 ◽  
Vol 341 ◽  
Author(s):  
Thomas Maeder ◽  
Paul Muralt

AbstractThe in-situ reactive sputter deposition of PbTiO3 on Pt/Ti/SiO2/Si from two metallic targets was investigated. A minimal lead oxide flux of two to three times the titanium oxide flux is needed in order to obtain stoichiometric films with the perovskite structure. For higher fluxes, the Pb/Ti ratio in the film stays at the stoichiometric value 1; the orientation changes from random to <100>; and the film morphology transforms from a rough to a smooth polycrystalline film. The obtained dielectric constants vary between 40 and 150, the losses between 2 and 4 % (10 kHz). The method could be extended to PbZrxTi1-xO3 for x ≤0.7. The orientation is lost when the Pt electrodes are replaced by RuO2 electrodes.


2018 ◽  
Vol 90 (18) ◽  
pp. 10967-10973 ◽  
Author(s):  
Yuqin Qian ◽  
Gang-hua Deng ◽  
Yi Rao

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