Pulsed laser deposition of silicon nitride thin films by laser ablation of a Si target in low pressure ammonia

1996 ◽  
Vol 31 (11) ◽  
pp. 2839-2847 ◽  
Author(s):  
I. N. Mihailescu ◽  
Adriana Lita ◽  
V. S. Teodorescu ◽  
A. Luches ◽  
M. Martino ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Laser Ablation ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Low Pressure ◽  
Laser Deposition

THE TARGET MORPHOLOGY DURING PULSED LASER DEPOSITION OF HYDROXYAPATITE THIN FILMS

2005 ◽  
Vol 12 (04) ◽  
pp. 539-543 ◽  
Author(s):  
QUANHE BAO ◽  
CHUANZHONG CHEN ◽  
LUBIN CHEN ◽  
DIANGANG WANG ◽  
TINGQUAN LEI ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
The Other ◽  
Laser Deposition ◽  
Grain Structure ◽  
Before And After ◽  
Modified Surface ◽  
Modified Surface Layer

A modified surface layer of hydroxyapatite (HA) target was observed before and after pulsed laser deposition. Two types of HA targets were used for laser ablation. We observed that the surface morphology of the target has a very fine compacted grain structure and presents many irregularities with some microroughness and microporosity before laser ablation. The laser ablated regions can be divided into two areas: one area is porous and rough but the other is dense and smooth. The percentage of particles in the films was high for the films produced with targets that were sintered at 1200°C.

Preparation of Line Patterned Mesoporous DAM-1 Thin Films via Pulsed Laser Deposition

2001 ◽  
Vol 704 ◽  
Author(s):  
Decio Coutinho ◽  
Kenneth J. Balkus
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Laser Printer ◽  
Transparent Film ◽  
Patterned Substrate ◽  
Mesoporous Film ◽  
Patterning Technique

AbstractPatterned mesoporous DAM-1 thin films were prepared on flexible transparent film utilizing the pulsed laser deposition and a line patterning technique. The patterned lines are transferred to the transparent film using a laser printer or copy machine. Laser ablation of DAM-1 onto the patterned substrate followed by a hydrothermal treatment resulted in a densely packed mesoporous film. Upon removal of the patterned lines (i.e. the underlying toner) by ultrasonic treatment in toluene, patterned DAM-1 films were produced.

The Preparation of Partially Oriented Zeolite Thin Films via Pulsed Laser Ablation

2002 ◽  
Vol 752 ◽  
Author(s):  
Zhongsheng Deng ◽  
Thomas J. Pisklak ◽  
Kenneth J. Balkus
Keyword(s):  
Thin Films ◽  
Stainless Steel ◽  
Laser Ablation ◽  
Pulsed Laser Deposition ◽  
Hydrothermal Treatment ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Laser Deposition ◽  
Treatment Results ◽  
Stainless Steel Foil

ABSTRACTThin films of zeolites including silicalite-1, mordenite and UTD-18 have been prepared on stainless steel foil via pulsed laser deposition (PLD). Laser ablation of as-synthesized zeolite targets onto stainless steel foil followed by a post hydrothermal treatment results in partially oriented zeolite thin films. SEM, XRD were used to characterize the zeolite thin films. Preliminary results for multilayercoatings of different zeolites will also be presented.

Pulsed laser deposition of non-stoichiometric silicon nitride (SiNx) thin films

2004 ◽  
Vol 79 (4-6) ◽  
pp. 1525-1527 ◽  
Author(s):  
J.M. Lackner ◽  
W. Waldhauser ◽  
R. Ebner ◽  
M. Beutl ◽  
G. Jakopic ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition

Pulsed laser deposition of PbMg1/3Nb2/3O3 thin films and PbMg1/3Nb2/3O3/PbTiO3 multilayers

2001 ◽  
Vol 11 (PR11) ◽  
pp. Pr11-65-Pr11-69
Author(s):  
N. Lemée ◽  
H. Bouyanfif ◽  
J. L. Dellis ◽  
M. El Marssi ◽  
M. G. Karkut ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition

SrBi2Nb2O9 ferroelectric thin films deposited by pulsed laser deposition on textured and epitaxied platinum electrodes

2001 ◽  
Vol 11 (PR11) ◽  
pp. Pr11-133-Pr11-137
Author(s):  
J. R. Duclère ◽  
M. Guilloux-Viry ◽  
A. Perrin ◽  
A. Dauscher ◽  
S. Weber ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Ferroelectric Thin Films ◽  
Laser Deposition ◽  
Platinum Electrodes
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