scholarly journals Molecular dynamics modeling of microstructure evolution during growth of amorphous carbon films

1996 ◽  
Vol 3 (1-3) ◽  
pp. 233-237 ◽  
Author(s):  
J. N. Glosli ◽  
M. R. Philpott ◽  
J. Belak
Keyword(s):  
Molecular Dynamics ◽  
Amorphous Carbon ◽  
Microstructure Evolution ◽  
Carbon Films ◽  
Dynamics Modeling ◽  
Amorphous Carbon Films ◽  
Molecular Dynamics Modeling

Molecular Dynamics Simulations of Structures of Amorphous Carbon Films via Deposition

2011 ◽  
Vol 194-196 ◽  
pp. 2220-2224
Author(s):  
Hui Qing Lan ◽  
Zheng Ling Kang
Keyword(s):  
Molecular Dynamics ◽  
Amorphous Carbon ◽  
Growth Dynamics ◽  
Carbon Films ◽  
Film Structure ◽  
Dynamics Simulation ◽  
Carbon Ions ◽  
Amorphous Carbon Films ◽  
Dynamics Simulations ◽  
The Impact

The growth of amorphous carbon films via deposition is investigated using molecular dynamics simulation with a modified Tersoff potential. The impact energy of carbon atoms ranges from 1 to 50 eV and the temperature of the diamond substrate is 300 K. The effects of the incident energy on the growth dynamics and film structure are studied in a detail. Simulation results show that the mobility of surface atoms in the cascade region is enhanced by impacting energetic carbon ions, especially at moderate energy, which favors the growth of denser and smoother films with better adhesion to the substrate. Our results agree qualitatively with the experimental observation.

Structural properties of amorphous carbon films by molecular dynamics simulation

2004 ◽  
Vol 177-178 ◽  
pp. 812-817 ◽  
Author(s):  
Seung-Hyeob Lee ◽  
Churl-Seung Lee ◽  
Seung-Cheol Lee ◽  
Kyu-Hwan Lee ◽  
Kwang-Ryeol Lee
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Structural Properties ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Dynamics Simulation ◽  
Amorphous Carbon Films
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