Temperature dependence of the Young's modulus of diamond thin film prepared by microwave plasma chemical vapour deposition

1993 ◽  
Vol 12 (5) ◽  
pp. 324-325 ◽  
Author(s):  
Y. Seino ◽  
S. Nagai
Keyword(s):  
Thin Film ◽  
Temperature Dependence ◽  
Young’S Modulus ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Plasma Chemical ◽  
Diamond Thin Film ◽  
Plasma Chemical Vapour Deposition

Diamond film growth by pulse-modulated magnetoactive microwave plasma chemical vapour deposition

1996 ◽  
Vol 281-282 ◽  
pp. 264-266 ◽  
Author(s):  
Akimitsu Hatta ◽  
Hidetoshi Suzuki ◽  
Ken-ichi Kadota ◽  
Toshimichi Ito ◽  
Akio Hiraki
Keyword(s):  
Chemical Vapour Deposition ◽  
Diamond Film ◽  
Vapour Deposition ◽  
Film Growth ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition ◽  
Diamond Film Growth

Deposition of crystalline C3N4 films via microwave plasma chemical vapour deposition

2007 ◽  
Vol 61 (11-12) ◽  
pp. 2243-2246 ◽  
Author(s):  
Jinchun Jiang ◽  
Wenjuan Cheng ◽  
Yang Zhang ◽  
Minbo Lan ◽  
Hesun Zhu ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition
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