Total reflection X-ray fluorescence spectroscopy using synchrotron radiation for trace impurity analysis of silicon wafer surfaces

1996 ◽  
Vol 2 (1) ◽  
pp. 23-29
Author(s):  
C. H. Chang ◽  
Y. M. Koo ◽  
H. Padmore
Keyword(s):  
Synchrotron Radiation ◽  
Fluorescence Spectroscopy ◽  
Silicon Wafer ◽  
Total Reflection ◽  
Trace Impurity ◽  
X Ray ◽  
Impurity Analysis ◽  
Wafer Surfaces

Total reflection x‐ray fluorescence spectroscopy using synchrotron radiation for wafer surface trace impurity analysis (invited)

1995 ◽  
Vol 66 (2) ◽  
pp. 1293-1297 ◽  
Author(s):  
P. Pianetta ◽  
N. Takaura ◽  
S. Brennan ◽  
W. Tompkins ◽  
S. S. Laderman ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Fluorescence Spectroscopy ◽  
Total Reflection ◽  
Trace Impurity ◽  
Wafer Surface ◽  
X Ray ◽  
Impurity Analysis

scholarly journals High-Sensitivity Total Reflection X-Ray Fluorescence Spectroscopy of Silicon Wafers Using Synchrotron Radiation.

1995 ◽  
Vol 11 (3) ◽  
pp. 515-518 ◽  
Author(s):  
Stephen S. LADERMAN ◽  
Alice Fischer-COLBRIE ◽  
Ayako SHIMAZAKI ◽  
Kunihiro MIYAZAKI ◽  
Sean BRENNAN ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Fluorescence Spectroscopy ◽  
High Sensitivity ◽  
Silicon Wafers ◽  
Total Reflection ◽  
X Ray

Analysis of Ni on Si-wafer surfaces using synchrotron radiation excited total reflection X-ray fluorescence analysis

1997 ◽  
Vol 52 (7) ◽  
pp. 901-906 ◽  
Author(s):  
P. Wobrauschek ◽  
R. Görgl ◽  
P. Kregsamer ◽  
Ch. Streli ◽  
S. Pahlke ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Fluorescence Analysis ◽  
Total Reflection ◽  
X Ray ◽  
Wafer Surfaces ◽  
Si Wafer
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