Ultra-trace analysis of metallic contaminations on silicon wafer surfaces by vapour phase decomposition/total reflection X-ray fluorescence (VPD/TXRF)

C. Neumann; P. Eichinger

doi:10.1016/0584-8547(91)80186-7

Ultra-trace analysis of metallic contaminations on silicon wafer surfaces by vapour phase decomposition/total reflection X-ray fluorescence (VPD/TXRF)

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(91)80186-7 ◽

1991 ◽

Vol 46 (10) ◽

pp. 1369-1377 ◽

Cited By ~ 72

Author(s):

C. Neumann ◽

P. Eichinger

Keyword(s):

Silicon Wafer ◽

Trace Analysis ◽

Vapour Phase ◽

Total Reflection ◽

Phase Decomposition ◽

X Ray ◽

Ultra Trace ◽

Wafer Surfaces ◽

Ultra Trace Analysis

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Determination of ultra trace contaminants on silicon wafer surfaces using total-reflection X-ray fluorescence TXRF ‘state-of-the-art’

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/s0584-8547(01)00312-3 ◽

2001 ◽

Vol 56 (11) ◽

pp. 2261-2274 ◽

Cited By ~ 51

Author(s):

S Pahlke ◽

L Fabry ◽

L Kotz ◽

C Mantler ◽

T Ehmann

Keyword(s):

Silicon Wafer ◽

State Of The Art ◽

Total Reflection ◽

X Ray ◽

Trace Contaminants ◽

Ultra Trace ◽

Wafer Surfaces

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Improvement of total reflection X-ray fluorescence analysis of low Z elements on silicon wafer surfaces at the PTB monochromator beamline for undulator radiation at the electron storage ring BESSY II

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/s0584-8547(01)00320-2 ◽

2001 ◽

Vol 56 (11) ◽

pp. 2073-2083 ◽

Cited By ~ 22

Author(s):

B Beckhoff ◽

R Fliegauf ◽

G Ulm ◽

G Pepponi ◽

C Streli ◽

...

Keyword(s):

Silicon Wafer ◽

Storage Ring ◽

Fluorescence Analysis ◽

Total Reflection ◽

Electron Storage ◽

Undulator Radiation ◽

X Ray ◽

Wafer Surfaces

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F70 Ultra-Trace Analysis and Speciation by TXRF-NEXAFS in the Soft X-ray Range—Invited

Powder Diffraction ◽

10.1154/1.1979034 ◽

2005 ◽

Vol 20 (2) ◽

pp. 175-175

Author(s):

B. Beckhoff

Keyword(s):

Trace Analysis ◽

X Ray ◽

Ultra Trace ◽

Ultra Trace Analysis

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Total reflection X-ray fluorescence spectroscopy using synchrotron radiation for trace impurity analysis of silicon wafer surfaces

Metals and Materials ◽

10.1007/bf03025943 ◽

1996 ◽

Vol 2 (1) ◽

pp. 23-29

Author(s):

C. H. Chang ◽

Y. M. Koo ◽

H. Padmore

Keyword(s):

Synchrotron Radiation ◽

Fluorescence Spectroscopy ◽

Silicon Wafer ◽

Total Reflection ◽

Trace Impurity ◽

X Ray ◽

Impurity Analysis ◽

Wafer Surfaces

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Synchrotron Radiation Total Reflection X-ray Fluorescence Spectroscopy for Microcontamination Analysis on Silicon Wafer Surfaces

10.2172/784854 ◽

1997 ◽

Cited By ~ 1

Author(s):

Norikatsu Takaura

Keyword(s):

Synchrotron Radiation ◽

Fluorescence Spectroscopy ◽

Silicon Wafer ◽

Total Reflection ◽

X Ray ◽

Wafer Surfaces

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Application of Total Reflection X-Ray Fluorescence Analysis for Metallic Trace Impurities on Silicon Wafer Surfaces

Semiconductor Fabrication: Technology and Metrology ◽

10.1520/stp26047s ◽

2008 ◽

pp. 305-305-9 ◽

Cited By ~ 9

Author(s):

P Eichinger ◽

HJ Rath ◽

H Schwenke

Keyword(s):

Silicon Wafer ◽

Fluorescence Analysis ◽

Total Reflection ◽

Trace Impurities ◽

X Ray ◽

Wafer Surfaces

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Analysis of Low Metallic Contamination on Silicon Wafer Surfaces by Vapor-Phase Treatment and Total Reflection X-ray Fluorescence Analysis

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.9037 ◽

2006 ◽

Vol 45 (12) ◽

pp. 9037-9043 ◽

Cited By ~ 7

Author(s):

Ayako Shimazaki ◽

Kunihiro Miyazaki ◽

Tsuyoshi Matsumura ◽

Shoko Ito

Keyword(s):

Silicon Wafer ◽

Vapor Phase ◽

Fluorescence Analysis ◽

Total Reflection ◽

X Ray ◽

Wafer Surfaces ◽

Metallic Contamination

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A new promising electrochemiluminescence probe based on ruthenium nanobeads/silver nanoparticles/graphene oxide modified electrode for ultra-trace analysis of bisphenol A

Journal of Applied Electrochemistry ◽

10.1007/s10800-021-01578-6 ◽

2021 ◽

Author(s):

Mohammad Ali Kamyabi ◽

Mohsen Moharramnezhad

Keyword(s):

Silver Nanoparticles ◽

Graphene Oxide ◽

Bisphenol A ◽

Modified Electrode ◽

Trace Analysis ◽

Ultra Trace ◽

Ultra Trace Analysis

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Ultra-trace analysis of 41Ca in urine by accelerator mass spectrometry: An inter-laboratory comparison

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2013.08.004 ◽

2013 ◽

Vol 313 ◽

pp. 14-20 ◽

Cited By ~ 4

Author(s):

George S. Jackson ◽

Darren J. Hillegonds ◽

Paul Muzikar ◽

Brent Goehring

Keyword(s):

Mass Spectrometry ◽

Accelerator Mass Spectrometry ◽

Trace Analysis ◽

Ultra Trace ◽

Ultra Trace Analysis

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Optimization of the electrokinetic sample introduction in capillary electrophoresis for the ultra trace determination of anions on silicon wafer surfaces

Chromatographia ◽

10.1007/bf02505575 ◽

1997 ◽

Vol 45 (1) ◽

pp. 301-311 ◽

Cited By ~ 23

Author(s):

Th. Ehmann ◽

K. Bächmann ◽

L. Fabry ◽

H. Rüfer ◽

S. Pahlke ◽

...

Keyword(s):

Capillary Electrophoresis ◽

Silicon Wafer ◽

Sample Introduction ◽

Trace Determination ◽

Determination Of Anions ◽

Ultra Trace ◽

Wafer Surfaces

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