Synchrotron Radiation Total Reflection X-ray Fluorescence Spectroscopy for Microcontamination Analysis on Silicon Wafer Surfaces
1996 ◽
Vol 2
(1)
◽
pp. 23-29
C. H. Chang
◽
Y. M. Koo
◽
H. Padmore
2001 ◽
Vol 56
(11)
◽
pp. 2261-2274
◽
S Pahlke
◽
L Fabry
◽
L Kotz
◽
C Mantler
◽
T Ehmann
2001 ◽
Vol 56
(11)
◽
pp. 2085-2094
◽
C Streli
◽
P Wobrauschek
◽
P Kregsamer
◽
G Pepponi
◽
P Pianetta
◽
...
1995 ◽
Vol 11
(3)
◽
pp. 515-518
◽
Stephen S. LADERMAN
◽
Alice Fischer-COLBRIE
◽
Ayako SHIMAZAKI
◽
Kunihiro MIYAZAKI
◽
Sean BRENNAN
◽
...
2001 ◽
Vol 56
(11)
◽
pp. 2073-2083
◽
B Beckhoff
◽
R Fliegauf
◽
G Ulm
◽
G Pepponi
◽
C Streli
◽
...
2003 ◽
Vol 58
(8)
◽
pp. 1445-1452
◽
Byung-Kook Huh
◽
Jae-Song Kim
◽
Nam-Su Shin
◽
Yang-Mo Koo
◽
Hye-Young Chung
1991 ◽
Vol 46
(10)
◽
pp. 1369-1377
◽
C. Neumann
◽
P. Eichinger
1997 ◽
Vol 52
(7)
◽
pp. 901-906
◽
P. Wobrauschek
◽
R. Görgl
◽
P. Kregsamer
◽
Ch. Streli
◽
S. Pahlke
◽
...
2003 ◽
Vol 58
(12)
◽
pp. 2105-2112
◽
C. Streli
◽
G. Pepponi
◽
P. Wobrauschek
◽
N. Zöger
◽
P. Pianetta
◽
...
P Eichinger
◽
HJ Rath
◽
H Schwenke