Role of CH2I2 catalysis in chemically enhanced MOCVD Cu process: Nature of superfilling in copper thin film growth

2008 ◽  
Vol 14 (6) ◽  
pp. 767-772
Author(s):  
Sung Gyu Pyo
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
Copper Thin Film

Role of solvents in chemical vapor deposition: implications for copper thin-film growth

1993 ◽  
Vol 97 (45) ◽  
pp. 11781-11786 ◽  
Author(s):  
Chao Ming Chiang ◽  
Timothy M. Miller ◽  
Lawrence H. Dubois
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Film Growth ◽  
Chemical Vapor ◽  
Thin Film Growth ◽  
Copper Thin Film

Investigating the role of hydrogen in ultra-nanocrystalline diamond thin film growth

2006 ◽  
Vol 18 (32) ◽  
pp. S1771-S1776 ◽  
Author(s):  
James Birrell ◽  
J E Gerbi ◽  
O A Auciello ◽  
J A Carlisle
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Nanocrystalline Diamond ◽  
Thin Film Growth ◽  
Diamond Thin Film

The Role of OTS Density on Pentacene and C 60 Nucleation, Thin Film Growth, and Transistor Performance

2009 ◽  
Vol 19 (12) ◽  
pp. 1962-1970 ◽  
Author(s):  
Ajay Virkar ◽  
Stefan Mannsfeld ◽  
Joon Hak Oh ◽  
Michael F. Toney ◽  
Yih Horng Tan ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth

Role of Surface Steps in Thin Film Growth and Properties Studied by Leem

1994 ◽  
Vol 355 ◽  
Author(s):  
M. S. Altman ◽  
Q. Cai ◽  
W. F. Chung ◽  
E. Z. Luo ◽  
H. Pinkvos ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
Surface Steps

Asymmetric surface intermixing during thin-film growth in the Co–Al system: Role of local acceleration of the deposited atoms

2008 ◽  
Vol 56 (5) ◽  
pp. 1011-1017 ◽  
Author(s):  
Sang-Pil Kim ◽  
Seung-Cheol Lee ◽  
Kwang-Ryeol Lee ◽  
Yong-Chae Chung
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth

scholarly journals Lattice gas study of thin-film growth scenarios and transitions between them: Role of substrate

2021 ◽  
Vol 103 (2) ◽  
Author(s):  
E. Empting ◽  
M. Klopotek ◽  
A. Hinderhofer ◽  
F. Schreiber ◽  
M. Oettel
Keyword(s):  
Thin Film ◽  
Lattice Gas ◽  
Film Growth ◽  
Thin Film Growth
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