Role of CH2I2 catalysis in chemically enhanced MOCVD Cu process: Nature of superfilling in copper thin film growth
2008 ◽
Vol 14
(6)
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pp. 767-772
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1993 ◽
Vol 97
(45)
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pp. 11781-11786
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Keyword(s):
2014 ◽
Vol 254
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pp. 131-137
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Keyword(s):
2006 ◽
Vol 18
(32)
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pp. S1771-S1776
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2009 ◽
Vol 19
(12)
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pp. 1962-1970
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1999 ◽
Vol 110
(24)
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pp. 12151-12160
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