Application of an Adaptive Neuro-Fuzzy Inference System for the Optimal Analysis of Chemical-Mechanical Polishing Process Parameters
2001 ◽
Vol 18
(1)
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pp. 20-28
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2007 ◽
Vol 38
(7-8)
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pp. 674-682
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Keyword(s):
2019 ◽
Vol 6
(1)
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pp. 133-145
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Keyword(s):
2019 ◽
Vol 234
(5)
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pp. 956-968
2003 ◽
Vol 21
(1)
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pp. 10-14
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2020 ◽
Vol 35
(4)
◽
pp. 469-477
Keyword(s):
2011 ◽
Vol 42
(2)
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pp. 385-392
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2017 ◽
Vol 3
(1)
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pp. 36-48