Influence of substrate temperature and ion-beam energy on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed-laser deposition

The bioactive properties of hydroxyapatite (HA) are well known in the implant industry and coatings of HA have been used to enhance the adhesion of living tissue to metal prostheses. Pulsed laser deposition (PLD) in a water vapour atmosphere is an appropriate method for the production of crystalline HA coatings. In this work the effect of RF plasma on thin films of HA grown by PLD at different substrate temperatures has been studied. The physicochemical properties of the films were studied by Fourier transform infrared spectroscopy (FTIR), X-ray diffraction (XRD) and energy dispersive spectroscopy (EDS), showing that the incorporation of RF discharge in the deposition chamber can lead to changes in the crystallinity and deposition rate of the films but substrate temperature still plays the most important role.

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Influence of substrate temperature and post-treatment on the properties of ZnO:Al thin films prepared by pulsed laser deposition

Applied Surface Science ◽

10.1016/j.apsusc.2005.02.137 ◽

2005 ◽

Vol 252 (5) ◽

pp. 1561-1567 ◽

Cited By ~ 64

Author(s):

Xin Chen ◽

Wenjie Guan ◽

Guojia Fang ◽

X.Z. Zhao

Keyword(s):

Thin Films ◽

Substrate Temperature ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Post Treatment ◽

Laser Deposition ◽

Influence Of Substrate

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Influence of substrate temperature on the structure and photoluminescence of Mg0.05Zn0.95O thin films grown by pulsed laser deposition

Acta Physica Sinica ◽

10.7498/aps.57.3735 ◽

2008 ◽

Vol 57 (6) ◽

pp. 3735

Author(s):

Wu Xiao-Li ◽

Chen Chang-Le ◽

Han Li-An ◽

Luo Bing-Cheng ◽

Gao Guo-Mian ◽

...

Keyword(s):

Thin Films ◽

Substrate Temperature ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Influence Of Substrate

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Synthesis of BCN thin films by nitrogen ion beam assisted pulsed laser deposition from a B4C target

Diamond and Related Materials ◽

10.1016/j.diamond.2007.01.021 ◽

2007 ◽

Vol 16 (8) ◽

pp. 1579-1585 ◽

Cited By ~ 22

Author(s):

Z.F. Ying ◽

D. Yu ◽

H. Ling ◽

N. Xu ◽

Y.F. Lu ◽

...

Keyword(s):

Thin Films ◽

Pulsed Laser Deposition ◽

Ion Beam ◽

Pulsed Laser ◽

Laser Deposition ◽

Nitrogen Ion

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Influence of substrate temperature on structures and dielectric properties of pyrochlore Bi1.5Zn1.0Nb1.5O7 thin films prepared by pulsed laser deposition

Applied Surface Science ◽

10.1016/j.apsusc.2010.04.056 ◽

2010 ◽

Vol 256 (22) ◽

pp. 6607-6611 ◽

Cited By ~ 24

Author(s):

Xiaohua Zhang ◽

Wei Ren ◽

Peng Shi ◽

Aifeng Tian ◽

Hong Xin ◽

...

Keyword(s):

Thin Films ◽

Dielectric Properties ◽

Substrate Temperature ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Influence Of Substrate

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A Study of Nanostructures of Thin Films in B–C–N System Produced by Pulsed Laser Deposition and Nitrogen Ion-Beam-Assisted Pulsed Laser Deposition

Journal of Materials Research ◽

10.1557/jmr.2004.19.3.759 ◽

2004 ◽

Vol 19 (3) ◽

pp. 759-767 ◽

Cited By ~ 1

Author(s):

S. Bysakh ◽

K. Chattopadhyay ◽

H. Ling ◽

J.D. Wu ◽

C. Dong ◽

...

Keyword(s):

Thin Films ◽

Pulsed Laser Deposition ◽

Room Temperature ◽

Ion Beam ◽

Pulsed Laser ◽

Laser Deposition ◽

Glass Substrates ◽

Different Temperatures ◽

Nitrogen Ion ◽

Micrometer Size

We report the synthesis of thin films of B–C–N and C–N deposited by N+ ion-beam-assisted pulsed laser deposition (IBPLD) technique on glass substrates at different temperatures. We compare these films with the thin films of boron carbide synthesized by pulsed laser deposition without the assistance of ion-beam. Electron diffraction experiments in the transmission electron microscope shows that the vapor quenched regions of all films deposited at room temperature are amorphous. In addition, shown for the first time is the evidence of laser melting and subsequent rapid solidification of B4C melt in the form of micrometer- and submicrometer-size round particulates on the respective films. It is possible to amorphize B4C melt droplets of submicrometer sizes. Solidification morphologies of micrometer-size droplets show dispersion of nanocrystallites of B4C in amorphous matrix within the droplets. We were unable to synthesize cubic carbon nitride using the current technique. However, the formation of nanocrystalline turbostratic carbo- and boron carbo-nitrides were possible by IBPLD on substrate at elevated temperature and not at room temperature. Turbostraticity relaxes the lattice spacings locally in the nanometric hexagonal graphite in C–N film deposited at 600 °C leading to large broadening of diffraction rings.

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