STEM (scanning transmission electron microscopy) analysis of femtosecond laser pulse induced damage to bulk silicon

2005 ◽  
Vol 81 (2) ◽  
pp. 371-378 ◽  
Author(s):  
E. Coyne ◽  
J.P. Magee ◽  
P. Mannion ◽  
G.M. O’Connor ◽  
T.J. Glynn
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