Effect of the excimer laser irradiation on sol–gel derived tungsten–titanium dioxide thin films

2010 ◽  
Vol 102 (1) ◽  
pp. 91-97 ◽  
Author(s):  
Yasir F. Joya ◽  
Zhu Liu
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Sol Gel ◽  
Excimer Laser Irradiation ◽  
Titanium Dioxide Thin Films

Phase Variation of Amorphous-Si and Poly-Si Thin Films with Excimer Laser Irradiation

1996 ◽  
Vol 35 (Part 2, No. 11B) ◽  
pp. L1473-L1475 ◽  
Author(s):  
Kuninori Kitahara ◽  
Katsuyuki Suga ◽  
Akito Hara ◽  
Kazuo Nakajima
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Phase Variation ◽  
Excimer Laser Irradiation ◽  
Amorphous Si

In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films

2013 ◽  
Vol 210 (12) ◽  
pp. 2729-2735 ◽  
Author(s):  
Ingmar Höger ◽  
Thomas Schmidt ◽  
Anja Landgraf ◽  
Martin Schade ◽  
Annett Gawlik ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Solid Phase ◽  
Solid Phase Epitaxy ◽  
Silicon Thin Films ◽  
Excimer Laser Irradiation

scholarly journals Optical and electrical properties of sol-gel spin coated titanium dioxide thin films

2017 ◽  
Vol 225 ◽  
pp. 012021
Author(s):  
Anusuya Sahoo ◽  
A R Jayakrishnan ◽  
K Kamakshi ◽  
J P B Silva ◽  
K C Sekhar ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Electrical Properties ◽  
Sol Gel ◽  
Optical And Electrical Properties ◽  
Titanium Dioxide Thin Films

Excimer laser irradiation of SrRuO3 epitaxial thin films

2000 ◽  
Vol 154-155 ◽  
pp. 622-626 ◽  
Author(s):  
F Benı́tez ◽  
J Roldán ◽  
V Trtı́k ◽  
C Guerrero ◽  
C Ferrater ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Epitaxial Thin Films ◽  
Excimer Laser Irradiation

Effects of cobalt thin films on the a-Si crystallisation induced by excimer laser irradiation

1999 ◽  
Vol 138-139 ◽  
pp. 145-149 ◽  
Author(s):  
P Mengucci ◽  
G Barucca ◽  
E D'Anna ◽  
M Jergel ◽  
S Luby ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Cobalt Thin Films ◽  
Excimer Laser Irradiation

Crystallisation of TiO2 thin films induced by excimer laser irradiation

2007 ◽  
Vol 254 (4) ◽  
pp. 971-974 ◽  
Author(s):  
O. Van Overschelde ◽  
R. Snyders ◽  
M. Wautelet
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Tio2 Thin Films ◽  
Excimer Laser Irradiation

Modification of sol–gel-derived amorphous Al2O3 thin films by F2 excimer laser irradiation at ambient temperature

2001 ◽  
Vol 16 (4) ◽  
pp. 1003-1009 ◽  
Author(s):  
Satoshi Takeda ◽  
Yoshiaki Ikuta ◽  
Masahiro Hirano ◽  
Hideo Hosono
Keyword(s):  
Thin Films ◽  
Ambient Temperature ◽  
Laser Irradiation ◽  
Surface Properties ◽  
Excimer Laser ◽  
Sol Gel ◽  
Marked Change ◽  
Chelating Agent ◽  
Photochemical Reactions ◽  
Norrish Type

F2 excimer laser (157 nm) irradiation was applied to modify sol–gel-derived amorphous Al2O3 thin films at ambient temperature. The surface morphology and density of the film were significantly altered by the laser irradiation (power: 2 mW/cm2/pulse). The surface properties of the film were also changed from hydrophilic to hydrophobic. These alterations were not observed when using ArF excimer laser (193 nm) irradiation at the same laser power as that of the F2 laser. It was found that the changes induced by F2 laser irradiation mainly arose from the direct photoexcitation of C = O groups in ethylacetoacetate, which was added as a chelating agent of aluminum-alkoxides. Consequently, photochemical reactions of the Norrish-type occur, resulting in the formation of hydrocarbon or olefin and the elimination of carbon monoxide (CO) or decomposition products. The elimination of CO is considered to cause the marked change in structure and surface properties of the film. Patterning of the gel films was successfully performed by using these findings.

Crystal growth of phosphor perovskite titanate thin films under excimer laser irradiation

2008 ◽  
Vol 93 (1) ◽  
pp. 51-55 ◽  
Author(s):  
Tomohiko Nakajima ◽  
Tetsuo Tsuchiya ◽  
Toshiya Kumagai
Keyword(s):  
Thin Films ◽  
Crystal Growth ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Excimer Laser Irradiation
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