Excimer laser irradiation of SrRuO3 epitaxial thin films

2000 ◽  
Vol 154-155 ◽  
pp. 622-626 ◽  
Author(s):  
F Benı́tez ◽  
J Roldán ◽  
V Trtı́k ◽  
C Guerrero ◽  
C Ferrater ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Epitaxial Thin Films ◽  
Excimer Laser Irradiation

Phase Variation of Amorphous-Si and Poly-Si Thin Films with Excimer Laser Irradiation

1996 ◽  
Vol 35 (Part 2, No. 11B) ◽  
pp. L1473-L1475 ◽  
Author(s):  
Kuninori Kitahara ◽  
Katsuyuki Suga ◽  
Akito Hara ◽  
Kazuo Nakajima
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Phase Variation ◽  
Excimer Laser Irradiation ◽  
Amorphous Si

In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films

2013 ◽  
Vol 210 (12) ◽  
pp. 2729-2735 ◽  
Author(s):  
Ingmar Höger ◽  
Thomas Schmidt ◽  
Anja Landgraf ◽  
Martin Schade ◽  
Annett Gawlik ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Solid Phase ◽  
Solid Phase Epitaxy ◽  
Silicon Thin Films ◽  
Excimer Laser Irradiation

Effects of cobalt thin films on the a-Si crystallisation induced by excimer laser irradiation

1999 ◽  
Vol 138-139 ◽  
pp. 145-149 ◽  
Author(s):  
P Mengucci ◽  
G Barucca ◽  
E D'Anna ◽  
M Jergel ◽  
S Luby ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Cobalt Thin Films ◽  
Excimer Laser Irradiation

Crystallisation of TiO2 thin films induced by excimer laser irradiation

2007 ◽  
Vol 254 (4) ◽  
pp. 971-974 ◽  
Author(s):  
O. Van Overschelde ◽  
R. Snyders ◽  
M. Wautelet
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Tio2 Thin Films ◽  
Excimer Laser Irradiation

Crystal growth of phosphor perovskite titanate thin films under excimer laser irradiation

2008 ◽  
Vol 93 (1) ◽  
pp. 51-55 ◽  
Author(s):  
Tomohiko Nakajima ◽  
Tetsuo Tsuchiya ◽  
Toshiya Kumagai
Keyword(s):  
Thin Films ◽  
Crystal Growth ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Excimer Laser Irradiation

Design of process diagnostics for excimer laser irradiation of oxide thin films

2014 ◽  
Vol 53 (5S1) ◽  
pp. 05FB08 ◽  
Author(s):  
Kentaro Shinoda ◽  
Tomohiko Nakajima ◽  
Mutsuko Hatano ◽  
Tetsuo Tsuchiya
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Oxide Thin Films ◽  
Process Diagnostics ◽  
Excimer Laser Irradiation

Fabrication and Microstructural Change of PMN-PT Thin Films on Si Substrates by PLD with Mask and Double-Pulse Lazer Excitation

2007 ◽  
Vol 350 ◽  
pp. 111-114 ◽  
Author(s):  
Shogo Hayashi ◽  
Naoki Wakiya ◽  
Takanori Kiguchi ◽  
M. Tanaka ◽  
Kazuo Shinozaki
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Nd:Yag Laser ◽  
Double Pulse ◽  
Pulse Excitation ◽  
High Deposition Rate ◽  
Si Substrates ◽  
Excimer Laser Irradiation ◽  
Krf Excimer Laser

Epitaxial Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) thin films were fabricated on (La,Sr)CoO3/CeO2/ YSZ coated Si substrates by double-pulse excitation PLD with and without a mask. For double-pulse excitation PLD without a mask in conditions of Nd:YAG laser irradiation before defocused KrF-excimer-laser irradiation, the surface roughness of PMN-PT thin films was rather less than that of the films fabricated using Nd:YAG single laser PLD. Thin films with smoother surfaces were deposited at the high deposition rate of 5.6 nm·min-1 using the mask and the double-pulse excitation PLD method in conditions of irradiation of Nd:YAG laser after KrF excimer laser at 0.5 =s delays.

Physico-chemical characterization of the effect of excimer laser irradiation on PMMA thin films

1997 ◽  
Vol 109-110 ◽  
pp. 218-221 ◽  
Author(s):  
S Beauvois ◽  
D Renaut ◽  
R Lazzaroni ◽  
L.D Laude ◽  
J.L Bredas
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Chemical Characterization ◽  
Physico Chemical ◽  
Excimer Laser Irradiation
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