Controllable nanostructure and optical properties of ZrO2 thin films by glancing angle deposition

2012 ◽  
Vol 107 (1) ◽  
pp. 227-232 ◽  
Author(s):  
Sumei Wang ◽  
Xurong Zhao ◽  
Zhengxiu Fan ◽  
Jianda Shao
Nanomaterials ◽  
2020 ◽  
Vol 10 (12) ◽  
pp. 2413
Author(s):  
Yao Shan ◽  
Pian Liu ◽  
Yao Chen ◽  
Haotian Zhang ◽  
Huatian Tu ◽  
...  

Yttrium fluoride (YF3) columnar thin films (CTFs) were fabricated by electron beam evaporation with the glancing angle deposition method. The microstructures and optical properties of YF3 CTFs were studied systematically. The YF3 films grown at different deposition angles are all amorphous. As the deposition angle increases, the columns in YF3 CTFs become increasingly separated and inclined, and the volume fraction of YF3 decreases, resulting in lower refractive indices. This phenomenon is attributed to the self-shadowing effect and limited adatom diffusion. The YF3 CTFs are optically biaxial anisotropic with the long axis (c-axis) parallel to the columns, the short axis (b-axis) perpendicular to the columns, and the other axis (a-axis) parallel to the film interface. The principal refractive index along the b-axis for the 82°-deposited sample is approximately 1.233 at 550 nm. For the 78°-deposited sample, the differences of principal refractive indices between the c-axis and the b-axis and between the a-axis and the b-axis reach the maximum 0.056 and 0.029, respectively. The differences of principal refractive indices were affected by both the deposition angle and the volume fraction of YF3.


1999 ◽  
Author(s):  
Jeremy C. Sit ◽  
Scott R. Kennedy ◽  
Dick J. Broer ◽  
Michael J. Brett

2006 ◽  
Vol 252 (24) ◽  
pp. 8734-8737 ◽  
Author(s):  
Sumei Wang ◽  
Xiaoyong Fu ◽  
Guodong Xia ◽  
Jianguo Wang ◽  
Jianda Shao ◽  
...  

2021 ◽  
Vol 16 (1) ◽  
pp. 91-100
Author(s):  
Ivan A. Azarov ◽  
Konstantin E. Kuper ◽  
Aleksey G. Lemzyakov ◽  
Vyacheslav V. Porosev ◽  
Alexander A. Shklyaev

The paper considers the optical properties and structure of thin films of titanium dioxide formed by the glancing angle deposition method. It was show that this method allows the formation of coatings having a significantly lower refractive index than that of the initial material. Thus, the experimentally obtained value of the refractive index of thin films of titanium dioxide was ~1.2, which is almost two times less than that of a polycrystalline material. This allows you to use this method to produce the coatings with a variable refractive index using only one material, changing the geometry of the deposition process only.


2008 ◽  
Vol 255 (5) ◽  
pp. 2192-2195 ◽  
Author(s):  
Xiudi Xiao ◽  
Guoping Dong ◽  
Cheng Xu ◽  
Hongbo He ◽  
Hongji Qi ◽  
...  

2018 ◽  
Vol 546 ◽  
pp. 33-43 ◽  
Author(s):  
D. Abdelkader ◽  
F. Chaffar Akkari ◽  
N. Khemiri ◽  
R. Miloua ◽  
F. Antoni ◽  
...  

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