The pulse vacuum-arc plasma generator for nanoengineering application

Applied Physics A ◽

10.1007/s00339-020-03922-7 ◽

2020 ◽

Vol 126 (9) ◽

Author(s):

A. M. Zhukeshov ◽

A. T. Gabdullina ◽

A. U. Amrenova ◽

K. Fermakhan

Keyword(s):

Plasma Generator ◽

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Boron Ion Implantation into Silicon by Use of the Boron Vacuum-Arc Plasma Generator

10.1063/1.2401509 ◽

2006 ◽

Author(s):

J. M. Williams ◽

C. C. Klepper ◽

D. J. Chivers ◽

R. C. Hazelton ◽

J. J. Moschella ◽

...

Keyword(s):

Ion Implantation ◽

Plasma Generator ◽

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Characterization and Optimization of Vacuum-arc Plasma Generator for Nanocomposite Tribological Coating Growth

10.21236/ada524437 ◽

2008 ◽

Author(s):

Volodymyr E. Strelnytskiy

Keyword(s):

Plasma Generator ◽

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Structure and Properties of Periodic Multilayer Metal/nitride Coatings Deposited from Filtered Vacuum-arc Plasma Using Ti-Al-Y Cathode

2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP) ◽

10.1109/nap51477.2020.9309561 ◽

2020 ◽

Author(s):

Vladimir Vasyliev ◽

Alexander Luchaninov ◽

Elena Reshetnyak ◽

Vladimir Strel'nitskij

Keyword(s):

Structure And Properties ◽

Metal Nitride ◽

Nitride Coatings ◽

Multilayer Metal

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On the relation of the ion velocity to the ion charge in the vacuum arc plasma

Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041) ◽

10.1109/deiv.2000.877298 ◽

2002 ◽

Author(s):

A.G. Parfyonov

Keyword(s):

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Spatial distribution of the vacuum arc plasma fluxes in a curvilinear magnetic duct

IEEE Transactions on Plasma Science ◽

10.1109/tps.2005.856506 ◽

2005 ◽

Vol 33 (5) ◽

pp. 1636-1640 ◽

Author(s):

A.I. Timoshenko ◽

V.S. Taran ◽

V.I. Tereshin ◽

O.G. Chechel'nitskiy

Keyword(s):

Spatial Distribution ◽

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Characterization of a 1 kA vacuum arc plasma gun for use as a metal vapour deposition source

Surface and Coatings Technology ◽

10.1016/0257-8972(90)90041-a ◽

1990 ◽

Vol 43-44 ◽

pp. 1024-1034 ◽

Author(s):

R.L. Boxman ◽

S. Goldsmith

Keyword(s):

Vapour Deposition ◽

Metal Vapour ◽

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Comparative properties of titanium oxide biomaterials grown by pulsed vacuum arc plasma deposition and by unbalanced magnetron sputtering(UBM)

The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2003.1229980 ◽

2003 ◽

Author(s):

Y.X. Leng ◽

J.Y. Chen ◽

G.J. Wan ◽

H. Sun ◽

P. Yang ◽

...

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Plasma Deposition ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Automatically reigniting dc vacuum arc plasma source

Review of Scientific Instruments ◽

10.1063/1.1494868 ◽

2002 ◽

Vol 73 (8) ◽

pp. 2971-2973 ◽

Author(s):

Liuhe Li ◽

Tao Zhang ◽

Paul K. Chu ◽

Ian G. Brown

Keyword(s):

Plasma Source ◽

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High efficiency filtered vacuum-arc plasma source

XXIst International Symposium on Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. ◽

10.1109/deiv.2004.1422654 ◽

2004 ◽

Author(s):

I.I. Aksenov ◽

V.V. Vasilyev ◽

A.A. Luchaninov ◽

A.O. Omarov ◽

V.E. Strel'nitskij ◽

...

Keyword(s):

High Efficiency ◽

Plasma Source ◽

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The effect of axisymmetric two-dimensional magnetic field on the configuration of vacuum-arc plasma

High Temperature ◽

10.1007/s10740-006-0020-4 ◽

2006 ◽

Vol 44 (2) ◽

pp. 166-171 ◽

Author(s):

E. F. Prozorov ◽

K. N. Ul’yanov ◽

V. A. Fedorov

Keyword(s):

Magnetic Field ◽

Two Dimensional ◽

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