Real time thickness measurement of thin film for end-point detector (EPD) of 12-inch spin etcher using the white light interferometry

2005 ◽  
Vol 11 (8-10) ◽  
pp. 958-964 ◽  
Author(s):  
Nohyu Kim
Keyword(s):  
Thin Film ◽  
Real Time ◽  
White Light ◽  
Thickness Measurement ◽  
White Light Interferometry ◽  
End Point ◽  
Point Detector

Real-time scanner error correction in white light interferometry

2014 ◽  
Author(s):  
Dong Chen ◽  
Joanna Schmit ◽  
Matt Novak
Keyword(s):  
Error Correction ◽  
Real Time ◽  
White Light ◽  
White Light Interferometry

Novel Algorithm for Retrieve Thin Film Reflection Phase and Physical Thickness from White-Light Interferometry

2010 ◽  
Vol 30 (6) ◽  
pp. 1835-1840
Author(s):  
罗震岳 Luo Zhenyue ◽  
薛晖 Xue Hui ◽  
张淑娜 Zhang Shuna ◽  
沈伟东 Shen Weidong ◽  
顾培夫 Gu Peifu ◽  
...  
Keyword(s):  
Thin Film ◽  
White Light ◽  
White Light Interferometry ◽  
Reflection Phase ◽  
Physical Thickness ◽  
Novel Algorithm

Initial estimation of thin film thickness measurement based on white light spectral interferometry

2016 ◽  
Vol 612 ◽  
pp. 267-273 ◽  
Author(s):  
Tong Guo ◽  
Juhong Wu ◽  
Lianfeng Ni ◽  
Xing Fu ◽  
Xiaotang Hu
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
White Light ◽  
Thickness Measurement ◽  
Thin Film Thickness ◽  
Spectral Interferometry ◽  
Film Thickness Measurement
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