Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry

Optics Express ◽

10.1364/oe.14.011885 ◽

2006 ◽

Vol 14 (24) ◽

pp. 11885 ◽

Author(s):

Young-Sik Ghim ◽

Seung-Woo Kim

Keyword(s):

Thin Film ◽

Refractive Index ◽

Film Thickness ◽

White Light ◽

White Light Interferometry ◽

Thin Film Thickness ◽

Thickness Profile

Download Full-text

Dispersive white-light interferometry for thin-film thickness profile measurement

10.1117/12.612076 ◽

2005 ◽

Author(s):

Young-Sik Ghim ◽

Seung-Woo Kim

Keyword(s):

Thin Film ◽

Film Thickness ◽

White Light ◽

Profile Measurement ◽

White Light Interferometry ◽

Thin Film Thickness ◽

Thickness Profile

Download Full-text

Fast and Reliable Measurement of Thin Film Thickness Profile Based on Wavelet Transform in Spectrally Resolved White-Light Interferometry

International Journal of Precision Engineering and Manufacturing ◽

10.1007/s12541-018-0024-0 ◽

2018 ◽

Vol 19 (2) ◽

pp. 213-219 ◽

Author(s):

Min-Gab Kim ◽

Heui-Jae Pahk

Keyword(s):

Thin Film ◽

Wavelet Transform ◽

Film Thickness ◽

White Light ◽

White Light Interferometry ◽

Reliable Measurement ◽

Thin Film Thickness ◽

Thickness Profile ◽

Spectrally Resolved

Download Full-text

Simultaneous measurements of thin-film thickness and refractive index by dispersive white-light interferometry

10.1117/12.732311 ◽

2007 ◽

Author(s):

Young-Sik Ghim ◽

Joonho You ◽

Seung-Woo Kim

Keyword(s):

Thin Film ◽

Refractive Index ◽

Film Thickness ◽

White Light ◽

White Light Interferometry ◽

Thin Film Thickness ◽

Simultaneous Measurements

Download Full-text

Organic Thin Film Thickness Profile and Refractive Index Measurements by White-Light Scanning Interferometer

Optical Interference Coatings 2016 ◽

10.1364/oic.2016.thb.9 ◽

2016 ◽

Author(s):

Yu-Xen Lin ◽

Meng-Chi Li ◽

Cheng-Chung Lee

Keyword(s):

Thin Film ◽

Refractive Index ◽

Film Thickness ◽

White Light ◽

Organic Thin Film ◽

Thin Film Thickness ◽

Thickness Profile ◽

Scanning Interferometer

Download Full-text

Thin-film Thickness Absolute Measurement by Differential Optic-fiber White Light Interferometry

2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) ◽

10.1109/i2mtc.2019.8826878 ◽

2019 ◽

Author(s):

Xu Lu ◽

Zhangjun Yu ◽

Jun Yang ◽

Yonggui Yuan ◽

Hanyang Li ◽

...

Keyword(s):

Thin Film ◽

Film Thickness ◽

White Light ◽

Absolute Measurement ◽

Optic Fiber ◽

White Light Interferometry ◽

Thin Film Thickness

Download Full-text

Thin film thickness measurements using Scanning White Light Interferometry

Thin Solid Films ◽

10.1016/j.tsf.2013.10.005 ◽

2014 ◽

Vol 550 ◽

pp. 10-16 ◽

Author(s):

B. Maniscalco ◽

P.M. Kaminski ◽

J.M. Walls

Keyword(s):

Thin Film ◽

Film Thickness ◽

White Light ◽

White Light Interferometry ◽

Thin Film Thickness ◽

Scanning White Light Interferometry ◽

Thickness Measurements

Download Full-text

Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry

Applied Optics ◽

10.1364/ao.51.005668 ◽

2012 ◽

Vol 51 (23) ◽

pp. 5668 ◽

Author(s):

Jing-tao Dong ◽

Rong-sheng Lu

Keyword(s):

Thin Film ◽

Sensitivity Analysis ◽

Film Thickness ◽

White Light ◽

Thickness Measurement ◽

White Light Interferometry ◽

Thin Film Thickness ◽

Scanning White Light Interferometry ◽

Film Thickness Measurement

Download Full-text

Thin film thickness and refractive index measurement by multiple beam interferometry

10.1117/12.854796 ◽

2009 ◽

Author(s):

T. Y. Chen ◽

Y. J. Lin ◽

S. G. Hu ◽

S. L. Yang ◽

J. C. Chung

Keyword(s):

Thin Film ◽

Refractive Index ◽

Film Thickness ◽

Thin Film Thickness ◽

Refractive Index Measurement ◽

Multiple Beam ◽

Index Measurement ◽

Multiple Beam Interferometry

Download Full-text

Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry

Optics and Lasers in Engineering ◽

10.1016/j.optlaseng.2007.07.005 ◽

2008 ◽

Vol 46 (2) ◽

pp. 179-184 ◽

Author(s):

Young-Min Hwang ◽

Sung-Won Yoon ◽

Jung-Hwan Kim ◽

Souk Kim ◽

Heui-Jae Pahk

Keyword(s):

Thin Film ◽

Wavelet Transform ◽

Film Thickness ◽

Profile Measurement ◽

Thin Film Thickness ◽

Thickness Profile ◽

Wavelength Scanning

Download Full-text

Study of thin film thickness measurement based on white light interference

10.1117/12.2257412 ◽

2017 ◽

Author(s):

Yuanbo Zheng ◽

Chunxiao Chu ◽

Xia Wang

Keyword(s):

Thin Film ◽

Film Thickness ◽

White Light ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Light Interference ◽

White Light Interference ◽

Film Thickness Measurement

Download Full-text