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Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry
Applied Optics
◽
10.1364/ao.51.005668
◽
2012
◽
Vol 51
(23)
◽
pp. 5668
◽
Cited By ~ 20
Author(s):
Jing-tao Dong
◽
Rong-sheng Lu
Keyword(s):
Thin Film
◽
Sensitivity Analysis
◽
Film Thickness
◽
White Light
◽
Thickness Measurement
◽
White Light Interferometry
◽
Thin Film Thickness
◽
Scanning White Light Interferometry
◽
Film Thickness Measurement
Download Full-text
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Study of thin film thickness measurement based on white light interference
10.1117/12.2257412
◽
2017
◽
Author(s):
Yuanbo Zheng
◽
Chunxiao Chu
◽
Xia Wang
Keyword(s):
Thin Film
◽
Film Thickness
◽
White Light
◽
Thickness Measurement
◽
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◽
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◽
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◽
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Initial estimation of thin film thickness measurement based on white light spectral interferometry
Thin Solid Films
◽
10.1016/j.tsf.2016.06.025
◽
2016
◽
Vol 612
◽
pp. 267-273
◽
Cited By ~ 5
Author(s):
Tong Guo
◽
Juhong Wu
◽
Lianfeng Ni
◽
Xing Fu
◽
Xiaotang Hu
Keyword(s):
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◽
Film Thickness
◽
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◽
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◽
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◽
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◽
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Thin film thickness measurements using Scanning White Light Interferometry
Thin Solid Films
◽
10.1016/j.tsf.2013.10.005
◽
2014
◽
Vol 550
◽
pp. 10-16
◽
Cited By ~ 30
Author(s):
B. Maniscalco
◽
P.M. Kaminski
◽
J.M. Walls
Keyword(s):
Thin Film
◽
Film Thickness
◽
White Light
◽
White Light Interferometry
◽
Thin Film Thickness
◽
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◽
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Multilayer thin film thickness measurement using sensitivity separation method
Optics Communications
◽
10.1016/j.optcom.2010.05.054
◽
2010
◽
Vol 283
(20)
◽
pp. 3989-3993
◽
Cited By ~ 3
Author(s):
Xing-zhi Gong
◽
Liang Cheng
◽
Fei-hong Yu
Keyword(s):
Thin Film
◽
Film Thickness
◽
Thickness Measurement
◽
Separation Method
◽
Multilayer Thin Film
◽
Thin Film Thickness
◽
Film Thickness Measurement
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Spectroscopic thin film thickness measurement system for semiconductor industries
Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)
◽
10.1109/imtc.1994.352008
◽
2002
◽
Cited By ~ 2
Author(s):
M. Horie
◽
N. Fujiwara
◽
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◽
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Film Thickness
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Thickness Measurement
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Thin Film Thickness
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Film Thickness Measurement
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Novel wide-angle ellipsometric arrangement for thin film thickness measurement
Journal of Physics Communications
◽
10.1088/2399-6528/aac084
◽
2018
◽
Vol 2
(5)
◽
pp. 055007
Author(s):
A W Abdallah
◽
R Tutsch
◽
N N Nagib
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Thin Film
◽
Film Thickness
◽
Thickness Measurement
◽
Wide Angle
◽
Thin Film Thickness
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Film Thickness Measurement
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Processing technology of interferogram for thin film thickness measurement
10.1117/12.837583
◽
2009
◽
Author(s):
Jun-hong Su
◽
Jin-man Ge
Keyword(s):
Thin Film
◽
Film Thickness
◽
Thickness Measurement
◽
Processing Technology
◽
Thin Film Thickness
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Film Thickness Measurement
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Combined thin-film thickness measurement and surface metrology of photovoltaic thin films using Coherence Correlation Interferometry
2012 38th IEEE Photovoltaic Specialists Conference
◽
10.1109/pvsc.2012.6317648
◽
2012
◽
Author(s):
Biancamaria Maniscalco
◽
Piotr M. Kaminski
◽
John M. Walls
Keyword(s):
Thin Film
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Thin Films
◽
Film Thickness
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Thickness Measurement
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Thin Film Thickness
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Application of optical spectral interferometry for thin film thickness measurement
2016 9th International Kharkiv Symposium on Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMW)
◽
10.1109/msmw.2016.7538130
◽
2016
◽
Author(s):
Konstantin A. Lukin
◽
Dmytro N. Tatyanko
◽
Alona B. Pikh
Keyword(s):
Thin Film
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Film Thickness
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Thickness Measurement
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Thin Film Thickness
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Spectral Interferometry
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Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry
Optics Express
◽
10.1364/oe.14.011885
◽
2006
◽
Vol 14
(24)
◽
pp. 11885
◽
Cited By ~ 62
Author(s):
Young-Sik Ghim
◽
Seung-Woo Kim
Keyword(s):
Thin Film
◽
Refractive Index
◽
Film Thickness
◽
White Light
◽
White Light Interferometry
◽
Thin Film Thickness
◽
Thickness Profile
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