Large-area roll printing and replication forming with curvature control of microlens array structures

Author(s):  
Yung-Jin Weng ◽  
Hau-Jan Lee
2016 ◽  
Vol 120 (43) ◽  
pp. 24932-24940 ◽  
Author(s):  
Jiwei Qi ◽  
Yinxiao Xiang ◽  
Weiguo Yan ◽  
Meng Li ◽  
Liusiyang Yang ◽  
...  

2011 ◽  
Vol 211-212 ◽  
pp. 1105-1109
Author(s):  
Xi Qiu Fan

Traditional optical lithography techniques to fabricate three-dimensional (3D) nanostructures are complicated and time consuming. Due to the capability to replicate nanostructures repeatedly in a large area with high resolution and uniformity, nanoimprint (NI) has been recognized as one of the promising approaches to fabricate 3-D nanostructures with high throughput and low cost. This paper introduces a novel 3-D nanostructure fabrication method by nanoimprint on silicon substrate. Nanoscale gratings and microlens array are taken as examples of 3-D nanostructures fabricated by nanoimprint. High fidelity demonstrates the possibility of nanoimprint to fabricate 3-D nanostructures on silicon substrate.


1999 ◽  
Vol 11 (5) ◽  
pp. 506-508 ◽  
Author(s):  
Hao-Lin Chen ◽  
D. Francis ◽  
T. Nguyen ◽  
Wupen Yuem ◽  
Gabriel Li ◽  
...  

2010 ◽  
Vol 17 (03) ◽  
pp. 383-387
Author(s):  
C. S. LIM ◽  
M. H. HONG ◽  
Y. LIN ◽  
L. S. TAN ◽  
A. SENTHIL KUMAR ◽  
...  

In the past decade, the development of nanoelectronics and nano-optics has attracted much interest in surface nanostructuring of semiconductor materials. The irradiation of a microlens array by a laser beam generates many focused light spots, which can act as a direct writing tool on photo-polymer materials. This maskless surface nanostructuring technique enables thousands to millions of identical nano-features to be patterned in a couple of laser pulses. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) images show that nano-features were patterned uniformly on the substrate surface, which suggests a versatile way of parallel surface nanostructuring over a large area. The simulation results of the energy flux distribution at the focal plane of the microlens arrays will also be discussed.


2019 ◽  
Vol 25 (12) ◽  
pp. 4495-4503 ◽  
Author(s):  
Yujie Hu ◽  
Xiaoyang Zhu ◽  
Hongke Li ◽  
Lei Qian ◽  
Jianjun Yang ◽  
...  

2010 ◽  
Vol 41 (1) ◽  
pp. 1405 ◽  
Author(s):  
Kuan-Yu Chen ◽  
Yu-Ting Hsiao ◽  
Hoang-Yan Lin ◽  
Jiun-Haw Lee ◽  
Mao-Kuo Wei
Keyword(s):  

2014 ◽  
Vol 39 (3) ◽  
pp. 606 ◽  
Author(s):  
Feng Chen ◽  
Zefang Deng ◽  
Qing Yang ◽  
Hao Bian ◽  
Guangqing Du ◽  
...  

2009 ◽  
Vol 149 (17-18) ◽  
pp. 729-733 ◽  
Author(s):  
Satoru Yamanaka ◽  
Naoki Suzuki ◽  
Bong Kuk Lee ◽  
Hea Yeon Lee ◽  
Hidekazu Tanaka ◽  
...  

1997 ◽  
Vol 36 (22) ◽  
pp. 5363 ◽  
Author(s):  
George H. Seward ◽  
Peter F. Mueller

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