A selective excitation mode design for a wider high-to-low frequencies tunable capacitive MEMS resonator
Keyword(s):
2020 ◽
Vol 26
(8)
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pp. 2389-2398
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Keyword(s):
2010 ◽
Vol 19
(3)
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pp. 191-196
1991 ◽
Vol 138
(3)
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pp. 213
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1964 ◽
Vol 111
(12)
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pp. 1993
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1971 ◽
Vol 32
(C2)
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pp. C2-147-C2-147