On the mechanical behavior of a wide tunable capacitive MEMS resonator for low frequency energy harvesting applications
2020 ◽
Vol 26
(8)
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pp. 2389-2398
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2009 ◽
Vol 20
(2)
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pp. 025015
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2018 ◽
Vol 20
(4)
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pp. 1720-1732
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