scholarly journals Modeling of non-ideal frequency response in capacitive MEMS resonator

2010 ◽  
Vol 19 (3) ◽  
pp. 191-196
Author(s):  
Hyoung-Ho Ko
Keyword(s):  
Frequency Response ◽  
Mems Resonator ◽  
Capacitive Mems

On the mechanical behavior of a wide tunable capacitive MEMS resonator for low frequency energy harvesting applications

2020 ◽  
Vol 26 (8) ◽  
pp. 2389-2398 ◽  
Author(s):  
Salar Ghasemi ◽  
Saeid Afrang ◽  
Ghader Rezazadeh ◽  
Sima Darbasi ◽  
Behzad Sotoudeh
Keyword(s):  
Energy Harvesting ◽  
Mechanical Behavior ◽  
Low Frequency ◽  
Mems Resonator ◽  
Capacitive Mems

Frequency Response of Electrostatically Actuated MEMS Resonators Under Superharmonic Resonance Using MMS

2016 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Frequency Response ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Second Order ◽  
Voltage Response ◽  
Order Problem ◽  
Plate Electrode ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Mems Resonator

This work investigates the voltage response of superharmonic resonance of second order of electrostatically actuated Micro-Electro-Mechanical Systems (MEMS) resonator cantilevers. The results of this work can be used for mass sensors design. The MEMS device consists of MEMS resonator cantilever over a parallel ground plate (electrode) under Alternating Current (AC) voltage. The AC voltage is of frequency near one fourth of the natural frequency of the resonator which leads to the superharmonic resonance of second order. The AC voltage produces an electrostatic force in the category of hard excitations, i.e. for small voltages the resonance is not present while for large voltages resonance occurs and bifurcation points are born. This solution is then used in the first-order problem to find the voltage-amplitude response of the structure. The influences of frequency and damping on the response are investigated. This work opens the door of using smaller AC frequencies for MEMS resonator sensors. The frequency response of the superharmonic resonance of the structure is investigated using the method of multiple scales (MMS).

Reduced Order Model of Frequency Response of Superharmonic Resonance of Electrostatically Actuated MEMS Resonators

2015 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Frequency Response ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Ground Plate

This paper deals with superharmonic resonance of electrostatically actuated MEMS resonator sensors. The system consists of a MEMS cantilever on top of a parallel ground plate. An AC voltage of frequency near one fourth the natural frequency of the resonator provides the electrostatic force of actuation. The frequency response of the superharmonic resonance of the structure is investigated using two term Reduced Order Model (ROM) method.

ROM of Electrostatically Actuated MEMS Resonators Under Simultaneous Resonances

2014 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Frequency Response ◽  
Natural Frequency ◽  
Electrostatic Actuation ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Simultaneous Resonances

This paper deals with MEMS resonator sensors under double electrostatic actuation. The system consists of a MEMS cantilever between two parallel fixed plates. The frequencies of actuation are near natural frequency and near half natural frequency. The frequency response of the simultaneous resonance of the structure is investigated using Reduced Order Model (ROM) method.

Comparison of RSG-MOSFET and capacitive MEMS resonator detection

2005 ◽  
Vol 41 (5) ◽  
pp. 242 ◽  
Author(s):  
N. Abelé ◽  
V. Pott ◽  
K. Boucart ◽  
F. Casset ◽  
K. Séguéni ◽  
...  
Keyword(s):  
Mems Resonator ◽  
Capacitive Mems

Statistics of frequency-response estimates

1990 ◽  
Vol 137 (5) ◽  
pp. 290 ◽  
Author(s):  
J.L. Douce ◽  
L. Balmer
Keyword(s):  
Frequency Response
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