Elimination of dispersion effect in a white-light scanning interferometer by using a spectral analyzer

2016 ◽  
Vol 24 (1) ◽  
pp. 27-32 ◽  
Author(s):  
Song-Jie Luo ◽  
Osami Sasaki ◽  
Yong-Xin Liu ◽  
Xiao-Yan Li ◽  
Zhi-Li Lin ◽  
...  
Keyword(s):  
White Light ◽  
Dispersion Effect ◽  
Spectral Analyzer ◽  
Scanning Interferometer

A nanomeasuring machine based white light tilt scanning interferometer for large scale optical array structure measurement

2011 ◽  
Vol 49 (9-10) ◽  
pp. 1124-1130 ◽  
Author(s):  
Tong Guo ◽  
Long Ma ◽  
Jian Zhao ◽  
Dante J. Dorantes-Gonzalez ◽  
Xing Fu ◽  
...  
Keyword(s):  
White Light ◽  
Large Scale ◽  
Scanning Interferometer ◽  
Array Structure ◽  
Structure Measurement

A Multiplexed Biosensor Based on White-light Scanning Interferometer

2016 ◽  
Author(s):  
Huai Yi Wang ◽  
Ying-Feng Chang ◽  
Li-Chen Su ◽  
Yu-Xen Lin ◽  
Cheng-Chung Lee ◽  
...  
Keyword(s):  
White Light ◽  
Scanning Interferometer

Microrelief Measurements for White-Light Interferometer with Adaptive Algorithm Interferogram Processing

2010 ◽  
Vol 437 ◽  
pp. 35-39 ◽  
Author(s):  
Evgeny V. Sysoev ◽  
Rodion V. Kulikov
Keyword(s):  
White Light ◽  
Adaptive Algorithm ◽  
Measurement Errors ◽  
Optimal Threshold ◽  
Interference Detection ◽  
Surface Microrelief ◽  
White Light Interferometer ◽  
Measuring Surface ◽  
Scanning Interferometer ◽  
Interferogram Processing

The problem of reducing measurement errors of surface microrelief with nonuniform scattering properties using white-light interferometer was discussed. Adaptive algorithm of thresholding which allows us to set optimal threshold in every point of measuring surface was proposed. Application of this algorithm of threshold choice allows increasing dynamical range of interference detection more than in 10 times. The dependences of scanning interferometer resolution on differentional interferogram thresholding have been discussed.

scholarly journals White-light scanning interferometer for absolute nano-scale gap thickness measurement

2009 ◽  
Vol 17 (17) ◽  
pp. 15104 ◽  
Author(s):  
Zhiguang Xu ◽  
Vijay Shilpiekandula ◽  
Kamal Youcef-toumi ◽  
Soon Fatt Yoon
Keyword(s):  
White Light ◽  
Thickness Measurement ◽  
Nano Scale ◽  
Scanning Interferometer

Shape measurement of a thin glass plate through analyzing dispersion effects in a white-light scanning interferometer

2021 ◽  
Vol 139 ◽  
pp. 106505
Author(s):  
Songjie Luo ◽  
Osami Sasaki ◽  
Samuel Choi ◽  
Takamasa Suzuki ◽  
Ziyang Chen ◽  
...  
Keyword(s):  
White Light ◽  
Glass Plate ◽  
Shape Measurement ◽  
Thin Glass ◽  
Dispersion Effects ◽  
Scanning Interferometer ◽  
Thin Glass Plate
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