Dependency of oxygen partial pressure on the characteristics of ZnO films grown by radio frequency magnetron sputtering

Radio Frequency Magnetron Sputtering

Zno Films ◽

Effect of Plused Negative Bias on Nucleation and Morphological Evolution of ZnO Films Deposited by Reactive Radio-frequency Magnetron Sputtering

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2009.00602 ◽

2009 ◽

Vol 24 (3) ◽

pp. 602-606 ◽

Cited By ~ 1

Author(s):

Wei-Jia FU ◽

Zhi-Wen LIU ◽

Jian-Feng GU ◽

Ming LIU ◽

Qing-Yu ZHANG

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Morphological Evolution ◽

Radio Frequency Magnetron Sputtering

Zno Films ◽

Negative Bias ◽

Research on property and wet etch of ZnO films grown by radio-frequency magnetron sputtering

2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications ◽

10.1109/spawda.2008.4775769 ◽

2008 ◽

Author(s):

Rui Chen ◽

Xu-ming Bian ◽

Bai-jie Fan ◽

Chun-he He ◽

Li Li

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Zno Films ◽

Wet Etch

Relation between surface and bulk electronic properties of Al doped ZnO films deposited at varying substrate temperature by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.4923224 ◽

2015 ◽

Vol 117 (24) ◽

pp. 245312 ◽

Cited By ~ 16

Author(s):

C. C. Singh ◽

T. A. Patel ◽

E. Panda

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Electronic Properties ◽

Zno Films ◽

Doped Zno

Growth of c-axis orientation ZnO films on polymer substrates by radio-frequency magnetron sputtering

Optical Materials ◽

10.1016/j.optmat.2007.06.003 ◽

2008 ◽

Vol 30 (8) ◽

pp. 1244-1250 ◽

Cited By ~ 11

Author(s):

Kaixin Chen ◽

Kin Seng Chiang ◽

Hau Ping Chan ◽

Pak Lim Chu

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Zno Films ◽

Axis Orientation ◽

Polymer Substrates

Growth of non-polar ZnO films on a-GaN/r-Al2O3 templates by radio-frequency magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2009.09.098 ◽

2010 ◽

Vol 489 (2) ◽

pp. 519-522 ◽

Cited By ~ 16

Author(s):

J.N. Dai ◽

X.Y. Han ◽

Z.H. Wu ◽

C.H. Yu ◽

R.F. Xiang ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron Sputtering

Zno Films ◽

Effects of substrate on the structural, electrical and optical properties of Al-doped ZnO films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.11.103 ◽

2009 ◽

Vol 517 (11) ◽

pp. 3265-3268 ◽

Cited By ~ 59

Author(s):

C. Li ◽

M. Furuta ◽

T. Matsuda ◽

T. Hiramatsu ◽

H. Furuta ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Zno Films ◽

Electrical And Optical Properties ◽

Doped Zno

Influences of nitrogen partial pressure on the optical properties of copper nitride films

RSC Advances ◽

10.1039/c6ra03479a ◽

2016 ◽

Vol 6 (47) ◽

pp. 40895-40899 ◽

Cited By ~ 13

Author(s):

Jianrong Xiao ◽

Meng Qi ◽

Yong Cheng ◽

Aihua Jiang ◽

Yaping Zeng ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Partial Pressure ◽

Nitrogen Partial Pressure ◽

Copper Nitride

Cu3N films were prepared by radio frequency magnetron sputtering techniques and the optical properties of the films were investigated.

Characteristics and luminescence of Ge doped ZnO films prepared by alternate radio frequency magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2004.10.037 ◽

2005 ◽

Vol 245 (1-4) ◽

pp. 414-419 ◽

Cited By ~ 63

Author(s):

D.H. Fan ◽

Z.Y. Ning ◽

M.F. Jiang

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Zno Films ◽

Doped Zno

An investigation on the effect of high partial pressure of hydrogen on the nanocrystalline structure of silicon carbide thin films prepared by radio-frequency magnetron sputtering

Spectrochimica Acta Part A Molecular and Biomolecular Spectroscopy ◽

10.1016/j.saa.2014.10.029 ◽

2015 ◽

Vol 136 ◽

pp. 1409-1417 ◽

Cited By ~ 8

Author(s):

Mohsen Daouahi ◽

Mourad Omri ◽

Abdul Ghani Yousseph Kerm ◽

Faisal Abdulaziz Al-Agel ◽

Najeh Rekik

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Partial Pressure ◽

Nanocrystalline Structure ◽

High Partial Pressure

Two-step growth of ZnO films deposited by reactive radio-frequency magnetron sputtering on Si(001) substrate

Acta Physica Sinica ◽

10.7498/aps.56.2369 ◽

2007 ◽

Vol 56 (4) ◽

pp. 2369

Author(s):

Gu Jian-Feng ◽

Liu Zhi-Wen ◽

Liu Ming ◽

Fu Wei-Jia ◽

Ma Chun-Yu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Zno Films ◽

Step Growth