Mathematical Simulation of a High-Frequency Low-Pressure Discharge with Gas Injection in Non-Local Approximation: Electro- and Plasmadynamics

2021 ◽  
Author(s):  
A. Yu. Shemakhin ◽  
V. S. Zheltukhin ◽  
E. Yu. Shemakhin
Keyword(s):  
Mathematical Simulation ◽  
High Frequency ◽  
Gas Injection ◽  
Low Pressure ◽  
Local Approximation ◽  
Pressure Discharge ◽  
Non Local

The Development of Polyethylene Naphthalate Films by Low-pressure High-frequency Plasma Chemical Vapor Deposition System with Advance Oxidations Process

2015 ◽  
Vol 18 (1) ◽  
Author(s):  
Nuttee Thungsuk ◽  
Toshifumi Yuji ◽  
Narong Mungkung ◽  
Yoshimi Okamura ◽  
Atsushi Fujimaru ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Frequency ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Polyethylene Naphthalate ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
High Frequency Plasma ◽  
Frequency Plasma

AbstractThe low-pressure high-frequency plasma chemical vapor deposition (CVD) system was developed with non-thermal plasma process to study the Polyethylene naphthalate (PEN) surface characteristics. Plasma surface treatment by oxygen can improve the adhesive properties. A mixture of Ar and O

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