Structure and property characterization of low-k dielectric porous thin films

2001 ◽  
Vol 30 (4) ◽  
pp. 304-308 ◽  
Author(s):  
Barry J. Bauer ◽  
Eric K. Lin ◽  
Hae-Jeong Lee ◽  
Howard Wang ◽  
Wen-Li Wu
Keyword(s):  
Thin Films ◽  
Structure And Property ◽  
Porous Thin Films ◽  
Property Characterization ◽  
Low K

Mechanical characterization of low-k and barrier dielectric thin films

2005 ◽  
Vol 82 (3-4) ◽  
pp. 368-373 ◽  
Author(s):  
N. Chérault ◽  
G. Carlotti ◽  
N. Casanova ◽  
P. Gergaud ◽  
C. Goldberg ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Characterization ◽  
Dielectric Thin Films ◽  
Low K

Characterization of chemical-vapor-deposited low-k thin films using x-ray porosimetry

2003 ◽  
Vol 82 (7) ◽  
pp. 1084-1086 ◽  
Author(s):  
Hae-Jeong Lee ◽  
Eric K. Lin ◽  
Barry J. Bauer ◽  
Wen-li Wu ◽  
Byung Keun Hwang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor ◽  
X Ray ◽  
Chemical Vapor Deposited ◽  
Low K

scholarly journals Growth and characterization of MMA/SiO2 hybrid low-k thin films for interlayer dielectric applications

2010 ◽  
Vol 33 (3) ◽  
pp. 197-201 ◽  
Author(s):  
Bhavana N. Joshi ◽  
M. A. More ◽  
A. M. Mahajan
Keyword(s):  
Thin Films ◽  
Interlayer Dielectric ◽  
Low K

scholarly journals Hydrothermal synthesis, structure, and property characterization of rare earth silicate compounds: NaBa3Ln3Si6O20 (Ln = Y, Nd, Sm, Eu, Gd)

2015 ◽  
Vol 48 ◽  
pp. 256-262 ◽  
Author(s):  
Liurukara D. Sanjeewa ◽  
Kyle Fulle ◽  
Colin D. McMillen ◽  
Fenglin Wang ◽  
Yufei Liu ◽  
...  
Keyword(s):  
Rare Earth ◽  
Hydrothermal Synthesis ◽  
Structure And Property ◽  
Property Characterization

Development and characterization of fluorine tin oxide electrodes modified with high area porous thin films containing gold nanoparticles

2010 ◽  
Vol 519 (1) ◽  
pp. 487-493 ◽  
Author(s):  
Carmen Quintana ◽  
Pedro Atienzar ◽  
Gerolamo Budroni ◽  
Laura Mora ◽  
Lucas Hernández ◽  
...  
Keyword(s):  
Thin Films ◽  
Gold Nanoparticles ◽  
Tin Oxide ◽  
Porous Thin Films ◽  
Oxide Electrodes ◽  
High Area

Growth and optical property characterization of textured barium titanate thin films for photonic applications

2007 ◽  
Vol 300 (2) ◽  
pp. 330-335 ◽  
Author(s):  
Matthew J. Dicken ◽  
Kenneth Diest ◽  
Young-Bae Park ◽  
Harry A. Atwater
Keyword(s):  
Thin Films ◽  
Optical Property ◽  
Barium Titanate ◽  
Property Characterization
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