Microstructure and mechanical properties of Cr films deposited with different peak powers by high-power impulse magnetron sputtering

Rare Metals ◽  
2017 ◽  
Author(s):  
Yu Wang ◽  
Bao-Hua Wu ◽  
Fan Jiang ◽  
Dong-Lin Ma ◽  
Yan Yu ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
High Power ◽  
Microstructure And Mechanical Properties

The Influence of Pulse Width on Microstructure and Mechanical Properties of CrNx Coatings Deposited by HPPMS

2014 ◽  
Vol 633 ◽  
pp. 398-401
Author(s):  
Xiang Min Xu ◽  
Hao Zhang ◽  
Yi Bin Jin ◽  
Hao Chen Zhao ◽  
Shu Wang Duo
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
High Power ◽  
Pulse Width ◽  
Pulse Length ◽  
Closed Field ◽  
Power Pulse ◽  
Phase Structures ◽  
Microstructure And Mechanical Properties ◽  
High Power Pulse

CrNx coatings were deposited by high power pulse magnetron sputtering in a closed field unbalanced system. The influence of pulse width on microstructure and mechanical properties of CrNx coatings was examined. Morphologies different from those fabricated by traditional magnetron sputtering were obtained, phase structures were also changed in the process. The coatings hardness were always improved in the increasing pulse length, while the best adhension of CrNx coatings about 25N was get when pulse length was 60us.

Microstructure and mechanical properties of W-C:H coatings deposited by pulsed reactive magnetron sputtering

2011 ◽  
Vol 205 (19) ◽  
pp. 4471-4479 ◽  
Author(s):  
Andrzej Czyżniewski ◽  
Witold Gulbiński ◽  
György Radnóczi ◽  
Marianna Szerencsi ◽  
Mieczysław Pancielejko
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Microstructure And Mechanical Properties
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