Optimal Design of Co/In/Cu Sputtering Target Assembly Using Finite Element Method and Taguchi Method
2019 ◽
Vol 32
(11)
◽
pp. 1407-1414
◽
Keyword(s):
Keyword(s):
2014 ◽
Vol 64
(1-2)
◽
pp. 462-470
◽
2008 ◽
Vol 17
(2)
◽
pp. 025024
◽
Keyword(s):
Keyword(s):
Keyword(s):
2013 ◽
Vol 397-400
◽
pp. 355-358
Keyword(s):
Keyword(s):
Keyword(s):