target assembly
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73
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Keyword(s):
2019 ◽
Vol 146
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pp. 1515-1519
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Keyword(s):
Optimal Design of Co/In/Cu Sputtering Target Assembly Using Finite Element Method and Taguchi Method
2019 ◽
Vol 32
(11)
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pp. 1407-1414
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Keyword(s):
2018 ◽
Vol 136
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pp. 1332-1336
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