Surface morphology of polycrystalline silicon films formed by chemical vapour deposition

1983 ◽  
Vol 65 (1-3) ◽  
pp. 411-414
Author(s):  
A.M. Beers ◽  
H.A. Van Der Linden ◽  
J. Bloem
Keyword(s):  
Surface Morphology ◽  
Chemical Vapour Deposition ◽  
Polycrystalline Silicon ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

scholarly journals Polycrystalline silicon films obtained by hot-wire chemical vapour deposition

1994 ◽  
Vol 59 (6) ◽  
pp. 645-651 ◽  
Author(s):  
J. Cifre ◽  
J. Bertomeu ◽  
J. Puigdollers ◽  
M. C. Polo ◽  
J. Andreu ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Polycrystalline Silicon ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silicon Films ◽  
Hot Wire ◽  
Polycrystalline Silicon Films

Silicon Films Deposited by Low-Pressure Chemical Vapour Deposition for Microsystems

2003 ◽  
Vol 93 ◽  
pp. 453-458 ◽  
Author(s):  
H. Mahfoz-Kotb ◽  
A.C. Salaün ◽  
T. Mohammed-Brahim ◽  
F. Bendriaa ◽  
F. Le Bihan ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Silicon Films ◽  
Pressure Chemical
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