Growth of polycrystalline silicon films on glass by high-temperature chemical vapour deposition

1997 ◽  
Vol 12 (2) ◽  
pp. 224-227 ◽  
Author(s):  
R B Bergmann ◽  
R Brendel ◽  
M Wolf ◽  
P Lölgen ◽  
J Krinke ◽  
...  
Keyword(s):  
High Temperature ◽  
Chemical Vapour Deposition ◽  
Polycrystalline Silicon ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

scholarly journals Polycrystalline silicon films obtained by hot-wire chemical vapour deposition

1994 ◽  
Vol 59 (6) ◽  
pp. 645-651 ◽  
Author(s):  
J. Cifre ◽  
J. Bertomeu ◽  
J. Puigdollers ◽  
M. C. Polo ◽  
J. Andreu ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Polycrystalline Silicon ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silicon Films ◽  
Hot Wire ◽  
Polycrystalline Silicon Films

Silicon Films Deposited by Low-Pressure Chemical Vapour Deposition for Microsystems

2003 ◽  
Vol 93 ◽  
pp. 453-458 ◽  
Author(s):  
H. Mahfoz-Kotb ◽  
A.C. Salaün ◽  
T. Mohammed-Brahim ◽  
F. Bendriaa ◽  
F. Le Bihan ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Silicon Films ◽  
Pressure Chemical
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