Improvement of gas-switching abruptness for atmospheric pressure organometallic vapor phase epitaxy

1994 ◽  
Vol 139 (3-4) ◽  
pp. 344-350 ◽  
Author(s):  
Farid Agahi ◽  
Charles R. Lutz ◽  
Kei May Lau
2010 ◽  
Vol 208 (2) ◽  
pp. 445-448 ◽  
Author(s):  
Naoki Furukawa ◽  
Atsushi Nishikawa ◽  
Takashi Kawasaki ◽  
Yoshikazu Terai ◽  
Yasufumi Fujiwara

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