Fiber optic low-coherence interferometry for non-invasive silicon wafer characterization

1994 ◽  
Vol 137 (1-2) ◽  
pp. 37-40 ◽  
Author(s):  
C.M. Lawson ◽  
R.R. Michael
Keyword(s):  
Silicon Wafer ◽  
Fiber Optic ◽  
Low Coherence ◽  
Non Invasive ◽  
Low Coherence Interferometry

Low Coherence Interferometry for Non-Invasive Semiconductor Monitoring

1993 ◽  
Vol 324 ◽  
Author(s):  
Chris M. Lawson ◽  
Robert R. Michael
Keyword(s):  
Solar Cell ◽  
Manufacturing Processes ◽  
Growth Monitoring ◽  
Low Coherence ◽  
Non Invasive ◽  
Low Coherence Interferometry ◽  
Silicon Growth ◽  
Silicon Thickness ◽  
Efficient Solar Cell ◽  
Optical Low Coherence Reflectometry

AbstractWe report on the first use of optical low coherence reflectometry (OLCR) for Edge Defined Film-Fed Growth (EFG) silicon characterization. This OLCR sensor system has been used to measure horizontal profiles of silicon thickness and flatness to an accuracy of 1.5 Rim with the sensor head positioned 1 cm away from the silicon. The use of this noninvasive sensor for EFG silicon growth monitoring may lead to more efficient solar cell manufacturing processes.

scholarly journals Digital phase demodulation for low-coherence interferometry-based fiber-optic sensors

2018 ◽  
Vol 411 ◽  
pp. 27-32 ◽  
Author(s):  
Y. Liu ◽  
R. Strum ◽  
D. Stiles ◽  
C. Long ◽  
A. Rakhman ◽  
...  
Keyword(s):  
Fiber Optic ◽  
Fiber Optic Sensors ◽  
Low Coherence ◽  
Digital Phase ◽  
Low Coherence Interferometry ◽  
Phase Demodulation

Fiber-optic temperature sensor using low-coherence interferometry

2008 ◽  
Vol 154 (1) ◽  
pp. 107-111 ◽  
Author(s):  
M. Jedrzejewska-Szczerska ◽  
R. Bogdanowicz ◽  
M. Gnyba ◽  
R. Hypszer ◽  
B. B. Kosmowski
Keyword(s):  
Temperature Sensor ◽  
Fiber Optic ◽  
Low Coherence ◽  
Low Coherence Interferometry ◽  
Fiber Optic Temperature Sensor ◽  
Fiber Optic Temperature
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