Low temperature etching of GaAs substrates and improved morphology of GaAs grown by metalorganic molecular beam epitaxy using trisdimethylaminoarsenic and triethylgallium

1995 ◽  
Vol 150 ◽  
pp. 551-556 ◽  
Author(s):  
D. Marx ◽  
H. Asahi ◽  
X.F. Liu ◽  
M. Higashiwaki ◽  
A.B. Villaflor ◽  
...  
1998 ◽  
Vol 37 (Part 2, No. 3A) ◽  
pp. L272-L274 ◽  
Author(s):  
Akio Ueta ◽  
Adrian Avramescu ◽  
Katsuhiro Uesugi ◽  
Ikuo Suemune ◽  
Hideaki Machida ◽  
...  

1992 ◽  
Author(s):  
Jun-ichi Shirakashi ◽  
Eisuke Tokumitsu ◽  
Makoto Konagai Akifumi Miyano ◽  
Ricard T. Yoshioka ◽  
Shinji Nozaki ◽  
...  

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