Photoluminescence and Raman studies of hydrogenated amorphous carbon films deposited by the rf plasma-enhanced CVD method

Journal of Non-Crystalline Solids ◽

10.1016/0022-3093(95)00469-6 ◽

1996 ◽

Vol 194 (1-2) ◽

pp. 93-102 ◽

Author(s):

Chi-Lin Chen ◽

Juh-Tzeng Lue

Keyword(s):

Amorphous Carbon ◽

Carbon Films ◽

Rf Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Plasma Enhanced Cvd ◽

Hydrogenated Amorphous

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Electronic properties of hydrogenated amorphous carbon films deposited using ECR-RF plasma method

Diamond and Related Materials ◽

10.1016/s0925-9635(00)00468-4 ◽

2001 ◽

Vol 10 (2) ◽

pp. 200-206 ◽

Author(s):

B. Racine ◽

M. Benlahsen ◽

K. Zellama ◽

R. Bouzerar ◽

J.P. Kleider ◽

...

Keyword(s):

Electronic Properties ◽

Amorphous Carbon ◽

Carbon Films ◽

Rf Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Plasma Method ◽

Hydrogenated Amorphous

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Growth process of hydrogenated amorphous carbon films synthesized by atmospheric pressure plasma enhanced CVD using nitrogen and helium as a dilution gas

Japanese Journal of Applied Physics ◽

10.7567/jjap.55.045503 ◽

2016 ◽

Vol 55 (4) ◽

pp. 045503 ◽

Author(s):

Takanori Mori ◽

Takachika Sakurai ◽

Taiki Sato ◽

Akira Shirakura ◽

Tetsuya Suzuki

Keyword(s):

Amorphous Carbon ◽

Atmospheric Pressure ◽

Growth Process ◽

Atmospheric Pressure Plasma ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Plasma Enhanced Cvd ◽

Pressure Plasma ◽

Hydrogenated Amorphous

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Effect of methane/hydrogen dilution on the properties of hydrogenated amorphous carbon films deposited by RF-plasma

Diamond and Related Materials ◽

10.1016/0925-9635(92)90160-p ◽

1992 ◽

Vol 1 (5-6) ◽

pp. 538-542 ◽

Author(s):

C. Serra ◽

E. Pascual ◽

F. Maass ◽

E. Bertran ◽

J. Esteve

Keyword(s):

Amorphous Carbon ◽

Carbon Films ◽

Rf Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Hydrogen Dilution ◽

Hydrogenated Amorphous

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Hardness and surface roughness of hydrogenated amorphous carbon films synthesized by atmospheric pressure plasma enhanced CVD method with various pulse frequencies

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2012.09.058 ◽

2013 ◽

Vol 215 ◽

pp. 460-464 ◽

Author(s):

T. Sakurai ◽

M. Noborisaka ◽

T. Hirako ◽

A. Shirakura ◽

T. Suzuki

Keyword(s):

Surface Roughness ◽

Amorphous Carbon ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Plasma Enhanced Cvd ◽

Pressure Plasma ◽

Hydrogenated Amorphous

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Microstructures of hydrogenated amorphous carbon films prepared by rf plasma CVD

Journal of Non-Crystalline Solids ◽

10.1016/0022-3093(89)90111-7 ◽

1989 ◽

Vol 114 ◽

pp. 196-198 ◽

Author(s):

Hideki Shimizu ◽

Setsuo Nakao ◽

Hiroshi Kusakabe ◽

Mikio Noda

Keyword(s):

Amorphous Carbon ◽

Carbon Films ◽

Rf Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Hydrogenated Amorphous

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Correlation of acetylene plasma discharge environment and the optical and electronic properties of the hydrogenated amorphous carbon films

Diamond and Related Materials ◽

10.1016/j.diamond.2019.04.021 ◽

2019 ◽

Vol 96 ◽

pp. 74-84 ◽

Author(s):

Mustafa A. Aldeeb ◽

Nasser Morgan ◽

A. Abouelsayed ◽

Khaled M. Amin ◽

Safwat Hassaballa

Keyword(s):

Electronic Properties ◽

Amorphous Carbon ◽

Plasma Discharge ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Optical And Electronic Properties ◽

Hydrogenated Amorphous

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Effect of Water Adsorption on the Frictional Properties of Hydrogenated Amorphous Carbon Films in Various Relative Humidities

Langmuir ◽

10.1021/acs.langmuir.0c02416 ◽

2021 ◽

Vol 37 (3) ◽

pp. 1012-1024

Author(s):

Takumi Ishikawa ◽

Junho Choi

Keyword(s):

Amorphous Carbon ◽

Water Adsorption ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Frictional Properties ◽

Effect Of Water ◽

Hydrogenated Amorphous

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Thermal Conductivity Enhancement in Ion-Irradiated Hydrogenated Amorphous Carbon Films

Nano Letters ◽

10.1021/acs.nanolett.1c00616 ◽

2021 ◽

Author(s):

Ethan A. Scott ◽

Sean W. King ◽

Nanette N. Jarenwattananon ◽

William A. Lanford ◽

Han Li ◽

...

Keyword(s):

Thermal Conductivity ◽

Amorphous Carbon ◽

Carbon Films ◽

Thermal Conductivity Enhancement ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Conductivity Enhancement ◽

Hydrogenated Amorphous

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Electrical and Optical Characterization of Acetylene RF CCP for Synthesis of Different Forms of Hydrogenated Amorphous Carbon Films

Plasma Chemistry and Plasma Processing ◽

10.1007/s11090-019-10031-8 ◽

2019 ◽

Vol 40 (1) ◽

pp. 387-406

Author(s):

Mustafa A. Aldeeb ◽

Nasser Morgan ◽

Ahmed Abouelsayed ◽

Khaled M. Amin ◽

Safwat Hassaballa

Keyword(s):

Amorphous Carbon ◽

Optical Characterization ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Hydrogenated Amorphous

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Photobleaching of paramagnetic defects in hydrogenated amorphous carbon films

Solid State Communications ◽

10.1016/0038-1098(93)90094-4 ◽

1993 ◽

Vol 86 (8) ◽

pp. 489-491 ◽

Author(s):

A. Reyes-Mena ◽

J. González-Hernández ◽

R. Asomoza

Keyword(s):

Amorphous Carbon ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Hydrogenated Amorphous

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