Hardness and surface roughness of hydrogenated amorphous carbon films synthesized by atmospheric pressure plasma enhanced CVD method with various pulse frequencies

2013 ◽  
Vol 215 ◽  
pp. 460-464 ◽  
Author(s):  
T. Sakurai ◽  
M. Noborisaka ◽  
T. Hirako ◽  
A. Shirakura ◽  
T. Suzuki
Keyword(s):  
Surface Roughness ◽  
Amorphous Carbon ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Plasma Enhanced Cvd ◽  
Cvd Method ◽  
Pressure Plasma ◽  
Hydrogenated Amorphous

scholarly journals Properties of Amorphous Carbon Films Synthesized by Atmospheric Pressure Glow Plasma CVD Method

2006 ◽  
Vol 19 (5) ◽  
pp. 673-678 ◽  
Author(s):  
Hideyuki Kodama ◽  
Satoshi Iizumi ◽  
Masayuki Nakaya ◽  
Akira Shirakura ◽  
Atsushi Morita ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Atmospheric Pressure ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Amorphous Carbon Films ◽  
Cvd Method ◽  
Atmospheric Pressure Glow Plasma ◽  
Glow Plasma
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