Growth process of hydrogenated amorphous carbon films synthesized by atmospheric pressure plasma enhanced CVD using nitrogen and helium as a dilution gas

2016 ◽  
Vol 55 (4) ◽  
pp. 045503 ◽  
Author(s):  
Takanori Mori ◽  
Takachika Sakurai ◽  
Taiki Sato ◽  
Akira Shirakura ◽  
Tetsuya Suzuki
Keyword(s):  
Amorphous Carbon ◽  
Atmospheric Pressure ◽  
Growth Process ◽  
Atmospheric Pressure Plasma ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Hydrogenated Amorphous Carbon ◽  
Plasma Enhanced Cvd ◽  
Pressure Plasma ◽  
Hydrogenated Amorphous

On the growth process of hydrogenated amorphous carbon films on silicon

1993 ◽  
Vol 2 (2-4) ◽  
pp. 229-232 ◽  
Author(s):  
F. López ◽  
M.V. Garcia-Cuenca ◽  
C. Serra ◽  
J.L. Morenza
Keyword(s):  
Amorphous Carbon ◽  
Growth Process ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Hydrogenated Amorphous Carbon ◽  
Hydrogenated Amorphous
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