Growth of high quality amorphous silicon-germanium films using low pressure remote electron-cyclotron-resonance discharge

1996 ◽  
Vol 198-200 ◽  
pp. 563-566 ◽  
Author(s):  
Sanjeev Kaushal ◽  
Vikram Dalal ◽  
Jun Xu
Keyword(s):  
Amorphous Silicon ◽  
Silicon Germanium ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Low Pressure ◽  
Electron Cyclotron ◽  
High Quality ◽  
Germanium Films ◽  
Amorphous Silicon Germanium

scholarly journals Amorphous Silicon-Germanium Films with Embedded Nanocrystals for Thermal Detectors with Very High Sensitivity

2016 ◽  
Vol 2016 ◽  
pp. 1-9 ◽  
Author(s):  
Cesar Calleja ◽  
Alfonso Torres ◽  
Pedro Rosales-Quintero ◽  
Mario Moreno
Keyword(s):  
Amorphous Silicon ◽  
Silicon Germanium ◽  
Chemical Vapor ◽  
Focal Plane Arrays ◽  
Large Temperature ◽  
Thermal Coefficient ◽  
Thermal Detectors ◽  
Germanium Films ◽  
Amorphous Silicon Germanium ◽  
Very High

We have optimized the deposition conditions of amorphous silicon-germanium films with embedded nanocrystals in a plasma enhanced chemical vapor deposition (PECVD) reactor, working at a standard frequency of 13.56 MHz. The objective was to produce films with very large Temperature Coefficient of Resistance (TCR), which is a signature of the sensitivity in thermal detectors (microbolometers). Morphological, electrical, and optical characterization were performed in the films, and we found optimal conditions for obtaining films with very high values of thermal coefficient of resistance (TCR = 7.9% K−1). Our results show that amorphous silicon-germanium films with embedded nanocrystals can be used as thermosensitive films in high performance infrared focal plane arrays (IRFPAs) used in commercial thermal cameras.

Low temperature and low pressure diamond synthesis in a microwave electron cyclotron resonance discharge

1991 ◽  
Vol 59 (10) ◽  
pp. 1170-1172 ◽  
Author(s):  
J. J. Chang ◽  
T. D. Mantei ◽  
Rama Vuppuladhadium ◽  
Howard E. Jackson
Keyword(s):  
Low Temperature ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Low Pressure ◽  
Electron Cyclotron ◽  
Diamond Synthesis
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