Sputter-Auger and Auger line shape analyses of SiC films produced by simultaneous sputter deposition of silicon and carbon
1982 ◽
Vol 11-12
◽
pp. 400-407
◽
1977 ◽
Vol 99
(1)
◽
pp. 117-120
◽
1991 ◽
Vol 17
(3)
◽
pp. 211-276
◽
1993 ◽
Vol 63
(2)
◽
pp. 117-130
◽
1981 ◽
Vol 7
(4)
◽
pp. 289-311
◽
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