The formation of buried Si3N4 layers in silicon by high dose nitrogen ion implantation

1983 ◽  
Vol 100 (3) ◽  
pp. L25-L28 ◽  
Author(s):  
U. Kreissig ◽  
W. Skorupa ◽  
E. Hensel
Keyword(s):  
Ion Implantation ◽  
High Dose ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion

Surface cavities produced by high-dose nitrogen ion implantation into silicon

2007 ◽  
Vol 39 (8) ◽  
pp. 698-701 ◽  
Author(s):  
M. Rudolphi ◽  
A. Markwitz ◽  
H. Baumann
Keyword(s):  
Ion Implantation ◽  
High Dose ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion

Segregation of Cu impurity in aluminium on silicon during high-dose nitrogen-ion implantation

1992 ◽  
Vol 15 (1-2) ◽  
pp. 137-140 ◽  
Author(s):  
Chenglu Lin ◽  
P.L.F. Hemment ◽  
Jinhua Li ◽  
C.W.M. Chan
Keyword(s):  
Ion Implantation ◽  
High Dose ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion

scholarly journals Effect of Nitrogen Ion Implantation on the Cavitation Erosion Resistance and Cobalt-Based Solid Solution Phase Transformations of HIPed Stellite 6

Materials ◽  
2021 ◽  
Vol 14 (9) ◽  
pp. 2324
Author(s):  
Mirosław Szala ◽  
Dariusz Chocyk ◽  
Anna Skic ◽  
Mariusz Kamiński ◽  
Wojciech Macek ◽  
...  
Keyword(s):  
Plastic Deformation ◽  
Stainless Steel ◽  
Ion Implantation ◽  
Phase Transformations ◽  
Erosion Rate ◽  
Cavitation Erosion ◽  
Matrix Phase ◽  
Nitrogen Ion Implantation ◽  
Stellite 6 ◽  
Nitrogen Ion

From the wide range of engineering materials traditional Stellite 6 (cobalt alloy) exhibits excellent resistance to cavitation erosion (CE). Nonetheless, the influence of ion implantation of cobalt alloys on the CE behaviour has not been completely clarified by the literature. Thus, this work investigates the effect of nitrogen ion implantation (NII) of HIPed Stellite 6 on the improvement of resistance to CE. Finally, the cobalt-rich matrix phase transformations due to both NII and cavitation load were studied. The CE resistance of stellites ion-implanted by 120 keV N+ ions two fluences: 5 × 1016 cm−2 and 1 × 1017 cm−2 were comparatively analysed with the unimplanted stellite and AISI 304 stainless steel. CE tests were conducted according to ASTM G32 with stationary specimen method. Erosion rate curves and mean depth of erosion confirm that the nitrogen-implanted HIPed Stellite 6 two times exceeds the resistance to CE than unimplanted stellite, and has almost ten times higher CE reference than stainless steel. The X-ray diffraction (XRD) confirms that NII of HIPed Stellite 6 favours transformation of the ε(hcp) to γ(fcc) structure. Unimplanted stellite ε-rich matrix is less prone to plastic deformation than γ and consequently, increase of γ phase effectively holds carbides in cobalt matrix and prevents Cr7C3 debonding. This phenomenon elongates three times the CE incubation stage, slows erosion rate and mitigates the material loss. Metastable γ structure formed by ion implantation consumes the cavitation load for work-hardening and γ → ε martensitic transformation. In further CE stages, phases transform as for unimplanted alloy namely, the cavitation-inducted recovery process, removal of strain, dislocations resulting in increase of γ phase. The CE mechanism was investigated using a surface profilometer, atomic force microscopy, SEM-EDS and XRD. HIPed Stellite 6 wear behaviour relies on the plastic deformation of cobalt matrix, starting at Cr7C3/matrix interfaces. Once the Cr7C3 particles lose from the matrix restrain, they debond from matrix and are removed from the material. Carbides detachment creates cavitation pits which initiate cracks propagation through cobalt matrix, that leads to loss of matrix phase and as a result the CE proceeds with a detachment of massive chunk of materials.

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