Structures and properties of a Ta2O5 thin film deposited by dc magnetron reactive sputtering in a pure O2 atmosphere

Vacuum ◽  
1990 ◽  
Vol 41 (4-6) ◽  
pp. 1204-1206 ◽  
Author(s):  
Chen Guoping ◽  
Li Lingzhen ◽  
Zhang Suixin ◽  
Zhang Haokang
Keyword(s):  
Thin Film ◽  
Reactive Sputtering ◽  
Structures And Properties ◽  
Dc Magnetron Reactive Sputtering

Transparency Improvement of SiCO Thin Film for Optical Waveguide with Reactive Sputtering Method

2020 ◽  
Vol 140 (12) ◽  
pp. 369-373
Author(s):  
Hiroyuki Nikkuni ◽  
Chizuru Numata ◽  
Ryoto Yamaji ◽  
Hiroshi Ito ◽  
Yoshio Kawamata
Keyword(s):  
Thin Film ◽  
Optical Waveguide ◽  
Reactive Sputtering

Thermal conductivity of ZnO thin film produced by reactive sputtering

2012 ◽  
Vol 111 (8) ◽  
pp. 084320 ◽  
Author(s):  
Yibin Xu ◽  
Masahiro Goto ◽  
Ryozo Kato ◽  
Yoshihisa Tanaka ◽  
Yutaka Kagawa
Keyword(s):  
Thin Film ◽  
Thermal Conductivity ◽  
Reactive Sputtering ◽  
Zno Thin Film

Reactive Sputtering Technique for Kesterite and Chalcogenide Based Thin Film Solar Cells

2018 ◽  
Vol 18 (11) ◽  
pp. 7670-7681
Author(s):  
Om Pal Singh ◽  
Kuldeep Singh Gour ◽  
Rahul Parmar ◽  
Vidya Nand Singh
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Reactive Sputtering ◽  
Thin Film Solar Cells

Properties of ZnO:Al films on polyester produced by dc magnetron reactive sputtering

2001 ◽  
Vol 48 (3-4) ◽  
pp. 137-143 ◽  
Author(s):  
M. Chen ◽  
Z.L. Pei ◽  
X. Wang ◽  
C. Sun ◽  
L.S. Wen
Keyword(s):  
Reactive Sputtering ◽  
Dc Magnetron Reactive Sputtering

Optimization of microstructure and optical properties of VO2 thin film prepared by reactive sputtering

2013 ◽  
Vol 113 (18) ◽  
pp. 183520 ◽  
Author(s):  
Y. Y. Luo ◽  
L. Q. Zhu ◽  
Y. X. Zhang ◽  
S. S. Pan ◽  
S. C. Xu ◽  
...  
Keyword(s):  
Thin Film ◽  
Optical Properties ◽  
Reactive Sputtering

scholarly journals Reactive sputtering of precursors for Cu2ZnSnS4 thin film solar cells

2012 ◽  
Vol 520 (24) ◽  
pp. 7093-7099 ◽  
Author(s):  
Tove Ericson ◽  
Tomas Kubart ◽  
Jonathan J. Scragg ◽  
Charlotte Platzer-Björkman
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Reactive Sputtering ◽  
Thin Film Solar Cells ◽  
Cu2znsns4 Thin Film
Sign in / Sign up

Export Citation Format

Share Document