7554. Defect productio and annealing due to high-energy ion implantation —I. Silicon
1997 ◽
Vol 127-128
◽
pp. 388-392
◽
Keyword(s):
1998 ◽
Vol 146
(1-4)
◽
pp. 323-328
◽
1993 ◽
Vol 32
(Part 1, No. 1B)
◽
pp. 303-307
◽
2002 ◽
Vol 15
(4)
◽
pp. 289-300
2009 ◽
Vol 389
(2)
◽
pp. 248-253
◽