In situ studies of epitaxial growth in the low energy electron microscope

Low energy electron microscopy (LEEM) has developed into one of the premier techniques for in situ studies of surface dynamical processes, such as epitaxial growth, phase transitions, chemisorption and strain relaxation phenomena. Over the last three years we have designed and constructed a new LEEM instrument, aimed at improved resolution, improved diffraction capabilities and greater ease of operation compared to present instruments.

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IN SITU STUDIES WITH LOW-ENERGY ELECTRON MICROSCOPY

Surface Review and Letters ◽

10.1142/s0218625x95000108 ◽

1995 ◽

Vol 02 (01) ◽

pp. 103-107

Author(s):

RUUD M. TROMP

Keyword(s):

Electron Microscopy ◽

Low Energy ◽

Energy Electron ◽

Misfit Dislocations ◽

Dynamical Processes ◽

In Situ Studies ◽

Kinetic Instability ◽

In Situ Observations ◽

Low Energy Electron

This paper gives a brief review of low-energy electron microscopy (LEEM) as used for in situ studies of surface dynamical processes. The capabilities of LEEM are illustrated with two examples. One is a kinetic instability observed during growth of the first layer of CaF 2 on Si (111). The second concerns the nucleation of misfit dislocations during the growth of thicker, epitaxial CaF 2 films on Si (111), as the critical thickness is exceeded. Both examples highlight the importance of real time, in situ observations of surface dynamical processes.

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Performance Evaluation of a Novel Type of Low-Energy Electron Microscope

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100180525 ◽

1990 ◽

Vol 48 (1) ◽

pp. 354-355

Author(s):

Bertholdand Senftinger ◽

Helmut Liebl

Keyword(s):

Electron Microscope ◽

High Resolution ◽

Field Strength ◽

Numerical Aperture ◽

Low Energy ◽

Energy Electron ◽

High Resolution Imaging ◽

Lens System ◽

Resolution Imaging ◽

Low Energy Electron

During the last few years the investigation of clean and adsorbate-covered solid surfaces as well as thin-film growth and molecular dynamics have given rise to a constant demand for high-resolution imaging microscopy with reflected and diffracted low energy electrons as well as photo-electrons. A recent successful implementation of a UHV low-energy electron microscope by Bauer and Telieps encouraged us to construct such a low energy electron microscope (LEEM) for high-resolution imaging incorporating several novel design features, which is described more detailed elsewhere.The constraint of high field strength at the surface required to keep the aberrations caused by the accelerating field small and high UV photon intensity to get an improved signal-to-noise ratio for photoemission led to the design of a tetrode emission lens system capable of also focusing the UV light at the surface through an integrated Schwarzschild-type objective. Fig. 1 shows an axial section of the emission lens in the LEEM with sample (28) and part of the sample holder (29). The integrated mirror objective (50a, 50b) is used for visual in situ microscopic observation of the sample as well as for UV illumination. The electron optical components and the sample with accelerating field followed by an einzel lens form a tetrode system. In order to keep the field strength high, the sample is separated from the first element of the einzel lens by only 1.6 mm. With a numerical aperture of 0.5 for the Schwarzschild objective the orifice in the first element of the einzel lens has to be about 3.0 mm in diameter. Considering the much smaller distance to the sample one can expect intense distortions of the accelerating field in front of the sample. Because the achievable lateral resolution depends mainly on the quality of the first imaging step, careful investigation of the aberrations caused by the emission lens system had to be done in order to avoid sacrificing high lateral resolution for larger numerical aperture.

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