Defect and dopant depth profiles in boron-implanted silicon studied with channeling and nuclear reaction analysis
1986 ◽
Vol 17
(3)
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pp. 234-241
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2016 ◽
Vol 371
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pp. 216-219
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1995 ◽
Vol 187
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pp. 264-269
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Keyword(s):
2003 ◽
Vol 515
(1-2)
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pp. 108-117
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2005 ◽
Vol 232
(1-4)
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pp. 280-284
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2008 ◽
Vol 266
(10)
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pp. 2259-2262
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