High-resolution electron microscopy analysis of ion-beam induced annealing of MeV As+ ion-implanted silicon
1991 ◽
Vol 59-60
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pp. 434-438
2005 ◽
Vol 85
(2)
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pp. 51-59
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1996 ◽
Vol 27
(10)
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pp. 2911-2915
1996 ◽
Vol 73
(4)
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pp. 155-162
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1998 ◽
Vol 110
(3)
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pp. 184-187
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1986 ◽
Vol 4
(1)
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pp. 1-19
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