High-resolution electron microscopy analysis of ion-beam induced annealing of MeV As+ ion-implanted silicon

Author(s):  
Zhang Bo-Xu ◽  
Wang Zhong-Lie ◽  
Qi Li ◽  
P.J. Zhang ◽  
J.G. Zheng ◽  
...  
2005 ◽  
Vol 85 (2) ◽  
pp. 51-59 ◽  
Author(s):  
H. A. Calderon * ◽  
G. Kostorz ◽  
L. Calzado-Lopez ◽  
C. Kisielowski ◽  
T. Mori

Micron (1969) ◽  
1977 ◽  
Vol 8 (3) ◽  
pp. 151-170 ◽  
Author(s):  
K. Hojou ◽  
T. Oikawa ◽  
K. Kanaya ◽  
T. Kimura ◽  
K. Adachi

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