High voltage modulator for pulsed ion implantation

1991 ◽  
Vol 62 (2) ◽  
pp. 293-296 ◽  
Author(s):  
Alaa A. Elmoursi ◽  
Gerard W. Malaczynski ◽  
Aboud H. Hamdi
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
High Voltage Modulator

Two switch high voltage modulator for plasma-based ion implantation

2002 ◽  
Vol 156 (1-3) ◽  
pp. 66-70 ◽  
Author(s):  
Ken Yukimura ◽  
Eiji Kuze ◽  
Koichi Matsunaga
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
High Voltage Modulator

Hybrid elevated-temperature, low/high-voltage plasma immersion ion implantation of AISI304 stainless steel

2001 ◽  
Vol 135 (2-3) ◽  
pp. 178-183 ◽  
Author(s):  
X.B. Tian ◽  
Y.X. Leng ◽  
T.K. Kwok ◽  
L.P. Wang ◽  
B.Y. Tang ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Elevated Temperature ◽  
Ion Implantation ◽  
High Voltage ◽  
Plasma Immersion Ion Implantation

Compact, high voltage modulator for direct radiation of ultrawideband RF pulses

1992 ◽  
Author(s):  
Ralph James ◽  
Howard E. Rhinehart ◽  
Hardev Singh ◽  
John Creedon
Keyword(s):  
High Voltage ◽  
Rf Pulses ◽  
Direct Radiation ◽  
High Voltage Modulator
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