Integrated high-voltage modulator for plasma immersion ion implantation with an RF plasma

2003 ◽  
Vol 12 (3) ◽  
pp. 495-499 ◽  
Author(s):  
A I Rogozin ◽  
V T Astrelin ◽  
E Richter ◽  
W M ller
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Rf Plasma ◽  
Plasma Immersion Ion Implantation ◽  
High Voltage Modulator

Hybrid elevated-temperature, low/high-voltage plasma immersion ion implantation of AISI304 stainless steel

2001 ◽  
Vol 135 (2-3) ◽  
pp. 178-183 ◽  
Author(s):  
X.B. Tian ◽  
Y.X. Leng ◽  
T.K. Kwok ◽  
L.P. Wang ◽  
B.Y. Tang ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Elevated Temperature ◽  
Ion Implantation ◽  
High Voltage ◽  
Plasma Immersion Ion Implantation

A high voltage pulse power supply for metal plasma immersion ion implantation and deposition

2010 ◽  
Vol 81 (12) ◽  
pp. 124703 ◽  
Author(s):  
M. C. Salvadori ◽  
F. S. Teixeira ◽  
W. W. R. Araújo ◽  
L. G. Sgubin ◽  
N. S. Sochugov ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Power Supply ◽  
Voltage Pulse ◽  
High Voltage Pulse ◽  
Pulse Power ◽  
Pulse Power Supply ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation
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